公开(公告)号：US10267621B2

公开(公告)日：2019-04-23

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/14 ,  G01B11/02 ,  G02B21/00 ,  G01B9/02

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.

公开(公告)号：US11668559B2

公开(公告)日：2023-06-06

申请号：US17485673

申请日：2021-09-27

Applicant: Keyence Corporation

Inventor： Yoshihisa Minamigawa ,  Yusuke Suemura ,  Hideto Takei

IPC: G01B11/25 ,  G02B13/22

CPC classification number: G01B11/254 ,  G02B13/22

Abstract: An optical measurement apparatus performs an optical axis adjustment with respect to a reference surface and obtains high measurement accuracy. In an outer surface of a box-shaped light receiving housing, reference surfaces which become a reference at the time of placing the light receiving housing. In the light receiving housing, the light receiving side telecentric lens is mounted. An imaging element holder holding a two-dimensional imaging element is provided on an inner surface opposite to an introducing opening of the light receiving housing, and the two-dimensional imaging element is mounted in a manner of being capable of adjusting its position and posture.

公开(公告)号：US20180356208A1

公开(公告)日：2018-12-13

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/02 ,  G02B21/00 ,  G01B9/02

CPC classification number: G01B11/026 ,  G01B9/02044 ,  G01B2210/50 ,  G02B21/0064 ,  G02B21/0076

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.