公开(公告)号：US10215631B2

公开(公告)日：2019-02-26

申请号：US15981927

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Hideto Takei ,  Tomikazu Sakaguchi

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/10 ,  G01J3/14 ,  G01B11/02

Abstract: To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member. The optical member includes a first diffraction lens configured to diffract the detection light and a first refraction lens configured to refract the detection light. The first diffraction lens is disposed with a non-diffraction surface exposed from the head housing.

公开(公告)号：US10161740B1

公开(公告)日：2018-12-25

申请号：US15981924

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Hideto Takei ,  Tomikazu Sakaguchi

IPC: G01B11/02 ,  G01J3/02

Abstract: The confocal displacement sensor includes a first optical fiber, to a first incident end of which light for light projection is input, the first optical fiber outputting the light from a first emission end, a second optical fiber, a second incident end of which is disposed to be opposed to the first emission end, the second optical fiber emitting light input via the second incident end from a second emission end, an optical member configured to cause an axial chromatic aberration on detection light emitted via the second emission end and converge the detection light toward the measurement object, a fiber connecting section configured to detachably connect the second incident end to the first emission end, and a refractive index matching material disposed between the first emission end and the second incident end.

公开(公告)号：US20190360796A1

公开(公告)日：2019-11-28

申请号：US16364209

申请日：2019-03-26

Applicant: Keyence Corporation

Inventor： Suketaka Fujimoto ,  Hideto Takei ,  Yohei Masuguchi ,  Shoma Kuga

IPC: G01B11/06

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

公开(公告)号：US20180356284A1

公开(公告)日：2018-12-13

申请号：US15981927

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Hideto Takei ,  Tomikazu Sakaguchi

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/10 ,  G01J3/14

CPC classification number: G01J3/0208 ,  G01B11/026 ,  G01J3/024 ,  G01J3/0243 ,  G01J3/10 ,  G01J3/14 ,  G01J3/2823

Abstract: To provide a confocal displacement sensor that can prevent deterioration in measurement accuracy due to a spherical aberration of an optical member. The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a pinhole configured to emit detection light by allowing the light emitted from the light source for light projection to pass, an optical member configured to generate an axial chromatic aberration in the detection light emitted via the pinhole and converge the detection light toward the measurement object, a measurement control section configured to calculate displacement of the measurement object on the basis of, in the detection light irradiated on the measurement object via the optical member, detection light passed through the pinhole by being reflected while focusing on the measurement object, and a head housing configured to house the pinhole and the optical member. The optical member includes a first diffraction lens configured to diffract the detection light and a first refraction lens configured to refract the detection light. The first refraction lens is disposed with a non-diffraction surface exposed from the head housing.

公开(公告)号：US10591280B2

公开(公告)日：2020-03-17

申请号：US16364209

申请日：2019-03-26

Applicant: Keyence Corporation

Inventor： Suketaka Fujimoto ,  Hideto Takei ,  Yohei Masuguchi ,  Shoma Kuga

IPC: G01B11/06

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

公开(公告)号：US10267621B2

公开(公告)日：2019-04-23

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/14 ,  G01B11/02 ,  G02B21/00 ,  G01B9/02

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.

公开(公告)号：US11668559B2

公开(公告)日：2023-06-06

申请号：US17485673

申请日：2021-09-27

Applicant: Keyence Corporation

Inventor： Yoshihisa Minamigawa ,  Yusuke Suemura ,  Hideto Takei

IPC: G01B11/25 ,  G02B13/22

CPC classification number: G01B11/254 ,  G02B13/22

Abstract: An optical measurement apparatus performs an optical axis adjustment with respect to a reference surface and obtains high measurement accuracy. In an outer surface of a box-shaped light receiving housing, reference surfaces which become a reference at the time of placing the light receiving housing. In the light receiving housing, the light receiving side telecentric lens is mounted. An imaging element holder holding a two-dimensional imaging element is provided on an inner surface opposite to an introducing opening of the light receiving housing, and the two-dimensional imaging element is mounted in a manner of being capable of adjusting its position and posture.

公开(公告)号：US20180356208A1

公开(公告)日：2018-12-13

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/02 ,  G02B21/00 ,  G01B9/02

CPC classification number: G01B11/026 ,  G01B9/02044 ,  G01B2210/50 ,  G02B21/0064 ,  G02B21/0076

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.

公开(公告)号：US20180356207A1

公开(公告)日：2018-12-13

申请号：US15981924

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Hideto Takei ,  Tomikazu Sakaguchi

IPC: G01B11/02 ,  G01J3/02

CPC classification number: G01B11/026 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0291

Abstract: The confocal displacement sensor includes a first optical fiber, to a first incident end of which light for light projection is input, the first optical fiber outputting the light from a first emission end, a second optical fiber, a second incident end of which is disposed to be opposed to the first emission end, the second optical fiber emitting light input via the second incident end from a second emission end, an optical member configured to cause an axial chromatic aberration on detection light emitted via the second emission end and converge the detection light toward the measurement object, a fiber connecting section configured to detachably connect the second incident end to the first emission end, and a refractive index matching material disposed between the first emission end and the second incident end.