公开(公告)号：US20190360796A1

公开(公告)日：2019-11-28

申请号：US16364209

申请日：2019-03-26

Applicant: Keyence Corporation

Inventor： Suketaka Fujimoto ,  Hideto Takei ,  Yohei Masuguchi ,  Shoma Kuga

IPC: G01B11/06

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

公开(公告)号：US10591280B2

公开(公告)日：2020-03-17

申请号：US16364209

申请日：2019-03-26

Applicant: Keyence Corporation

Inventor： Suketaka Fujimoto ,  Hideto Takei ,  Yohei Masuguchi ,  Shoma Kuga

IPC: G01B11/06

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

公开(公告)号：US10267621B2

公开(公告)日：2019-04-23

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/14 ,  G01B11/02 ,  G02B21/00 ,  G01B9/02

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.

公开(公告)号：US20180356208A1

公开(公告)日：2018-12-13

申请号：US15981925

申请日：2018-05-17

Applicant: Keyence Corporation

Inventor： Shoma Kuga ,  Suketaka Fujimoto ,  Hideto Takei ,  Yusuke Suemura ,  Tomikazu Sakaguchi

IPC: G01B11/02 ,  G02B21/00 ,  G01B9/02

CPC classification number: G01B11/026 ,  G01B9/02044 ,  G01B2210/50 ,  G02B21/0064 ,  G02B21/0076

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception waveforms.