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    CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION CORRECTION METHOD
    3.
    发明申请
    CHARGED PARTICLE BEAM DEVICE PROVIDED WITH AUTOMATIC ABERRATION CORRECTION METHOD 审中-公开
    充电颗粒光束装置提供自动去除校正方法

    公开(公告)号：US20130068949A1

    公开(公告)日：2013-03-21

    申请号：US13700142

    申请日：2011-05-27

    申请人： Kotoko Urano ,  Takeshi Kawasaki ,  Tomonori Nakano ,  Hiroyuki Ito

    发明人： Kotoko Urano ,  Takeshi Kawasaki ,  Tomonori Nakano ,  Hiroyuki Ito

    IPC分类号： H01J37/26

    CPC分类号： H01J37/153 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/15 ,  H01J2237/221 ,  H01J2237/31749

    摘要： Disclosed is an aberration measurement method of a charged particle beam device provided with an aberration corrector (4). The method is characterized by: when measuring aberration, (A) the number of pixels or the resolution is changed of a first image and a second image that are benchmarks when measuring field of view offset, and after determining the destination of movement resulting from a rough field of view offset, the number of pixels or the resolution of the first image and the second image are set to the same conditions, and the amount of field of view offset is measured precisely, or (B) a sample having lines in the horizontal direction and in the vertical direction is one-dimensionally scanned, and the amount of movement is measured from the signal position offset. As a result, in a charged particle beam device provided mounted with an aberration corrector, it becomes possible to provide a highly precise aberration measurement method that is not to the detriment of measurement time.

    摘要翻译： 公开了一种带有像差校正器（4）的带电粒子束装置的像差测量方法。 该方法的特征在于：当测量像差时，（A）测量视场偏移时的第一图像和第二图像的像素数量或分辨率被改变为基准，并且在确定由 粗糙视野偏移，像素数或第一图像和第二图像的分辨率被设置为相同的条件，并且精确地测量视场偏移量，或（B）具有线中的样本 水平方向和垂直方向被一维地扫描，并且从信号位置偏移测量移动量。 结果，在设置有像差校正器的带电粒子束装置中，可以提供不损害测量时间的高精度像差测量方法。

    Multipole measurement apparatus
    4.
    发明授权
    Multipole measurement apparatus 有权
    多极测量装置

    公开(公告)号：US08987680B2

    公开(公告)日：2015-03-24

    申请号：US14241035

    申请日：2012-05-23

    申请人： Tomonori Nakano ,  Kotoko Urano ,  Hiroyuki Ito

    发明人： Tomonori Nakano ,  Kotoko Urano ,  Hiroyuki Ito

    IPC分类号： G21K5/04 ,  G21K1/00 ,  H01J37/153 ,  H01J37/26 ,  H01J37/244

    CPC分类号： G21K1/00 ,  H01J37/153 ,  H01J37/244 ,  H01J37/26 ,  H01J2237/2446 ,  H01J2237/2826

    摘要： In order to provide a multipole measurement apparatus that can easily obtain table data for an aberration corrector that corrects the aberrations in a charged particle beam apparatus, the multipole measurement apparatus, which is provided with an optical system (10), a space into which an aberration corrector (6) is to be inserted, and a position detector (7), measures the relationship between the incident position and angle of a primary charged particle beam on the aberration corrector (6) at a plurality of points, the irradiation position upon the position detector (7), and a multipole, in a state of having a multipole field excited and in a state of not having a multipole field excited, so as to extract multipole components contained in the measurement executed in the state of having the multipole field excited.

    摘要翻译： 为了提供一种可以容易地获得用于校正带电粒子束装置中的像差的像差校正器的表格数据的多极测量装置，具有光学系统（10）的多极测量装置， 将像差校正器（6）插入，并且位置检测器（7）测量多个点处的像差校正器（6）上的初级带电粒子束的入射位置和角度之间的关系， 位置检测器（7）和多极，具有被激励的多极场的状态，并且处于不具有多极场激励的状态，以便提取包含在具有多极的状态下的测量中的多极分量 场激动