摘要:
A method for manufacturing an indium tin oxide (ITO) target and methods for preparing indium oxide powder (In2O3) and tin oxide powder (SnO2). The method for manufacturing an ITO (indium tin oxide) target includes preparing an In2O3 powder having a surface area of about 10-18 m2/g and an average particle diameter of between about 40 to 80 nm; preparing a SnO2 powder having a surface area of about 8-15 m2/g and an average particle diameter of about 60-100 nm; molding a mixture of the In2O3 powder and the SnO2 powder; and sintering the mixture at atmospheric pressure under oxidation atmosphere. The ITO target is applicable for a high-quality, transparent electrode for a display, such as a liquid crystal display, electroluminescent display, or field emission display.
摘要翻译:一种氧化铟锡(ITO)靶的制造方法及其制造方法,其中,氧化铟粉末(N 2 O 3 O 3)和氧化锡粉末(SnO 2 O 3) / SUB>)。 制造ITO(氧化铟锡)靶的方法包括制备表面积约10-18m 2 / cm 2的In 2 O 3 O 3 3粉末, SUP> / g,平均粒径为约40〜80nm; 制备表面积为约8-15m 2 / g且平均粒径为约60-100nm的SnO 2 N 2粉末; 模制In 2 N 3 O 3 N 3粉末和SnO 2 N 2粉末的混合物; 并在大气压下在氧化气氛下烧结混合物。 ITO靶可用于液晶显示器,电致发光显示器或场致发射显示器等用于显示器的高品质透明电极。
摘要:
A method for manufacturing an indium tin oxide (ITO) target and methods for preparing indium oxide powder (In2O3) and tin oxide powder (SnO2). The method for manufacturing an ITO (indium tin oxide) target includes preparing an In2O3 powder having a surface area of about 10-18 m2/g and an average particle diameter of between about 40 to 80 nm; preparing a SnO2 powder having a surface area of about 8-15 m2/g and an average particle diameter of about 60-100 nm; molding a mixture of the In2O3 powder and the SnO2 powder; and sintering the mixture at atmospheric pressure under oxidation atmosphere. The ITO target is applicable for a high-quality, transparent electrode for a display, such as a liquid crystal display, electroluminescent display, or field emission display.