公开(公告)号：US20180248060A1

公开(公告)日：2018-08-30

申请号：US15904030

申请日：2018-02-23

Applicant: LG ELECTRONICS INC.

Inventor： Younggu DO ,  Sungjin KIM ,  Hyungwook CHOI

IPC: H01L31/04 ,  H01L31/0376 ,  H01L31/18 ,  H01L31/0352

CPC classification number: H01L31/04 ,  H01L31/02167 ,  H01L31/022425 ,  H01L31/02363 ,  H01L31/0352 ,  H01L31/03762 ,  H01L31/068 ,  H01L31/1804 ,  H01L31/1864 ,  H01L31/1868 ,  H01L31/202 ,  Y02E10/547 ,  Y02P70/521

Abstract: Provided is a method of manufacturing a photovoltaic solar cell, including: forming a first conductivity type region that contains a first conductivity dopant, on one surface of a semiconductor substrate and an opposite surface that is opposite to the one surface; removing the first conductivity type region formed on the opposite surface of the semiconductor substrate by performing dry etching; and forming a second conductivity type region that contains a second conductivity type dopant, on the opposite surface of the semiconductor substrate.