公开(公告)号：US20030124863A1

公开(公告)日：2003-07-03

申请号：US10292513

申请日：2002-11-13

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Eui Hoon Hwang ,  Chan Il Park

IPC: H01L021/311

CPC classification number: C23C16/45523 ,  C23C16/30 ,  H01L21/0214 ,  H01L21/02164 ,  H01L21/0217 ,  H01L21/022 ,  H01L21/02274 ,  H01L21/31116 ,  H01L21/3144 ,  H01L21/3145 ,  H01L21/31612 ,  H01L21/76802 ,  H01L29/66757

Abstract: A method of forming an insulating layer including preparing a substrate and depositing an insulating layer on the substrate such that density of a top portion of the insulating layer is different from that of a bottom portion of the insulating layer.

Abstract translation: 一种形成绝缘层的方法，包括准备衬底并在衬底上沉积绝缘层，使得绝缘层的顶部的密度与绝缘层的底部的密度不同。