Etchant for etching double-layered copper structure and method of forming array substrate having double-layered copper structures
    1.
    发明申请
    Etchant for etching double-layered copper structure and method of forming array substrate having double-layered copper structures 审中-公开
    用于蚀刻双层铜结构的蚀刻剂和形成具有双层铜结构的阵列基板的方法

    公开(公告)号:US20040262569A1

    公开(公告)日:2004-12-30

    申请号:US10867007

    申请日:2004-06-15

    Abstract: An etchant for forming double-layered signal lines and electrodes of a liquid crystal display device includes hydrogen peroxide (H2O2), a phosphate, F-ions, an organic acid having a carboxyl group (nullCOOH), a copper (Cu) inhibitor, and a hydrogen peroxide (H2O2) stabilizer, wherein each of the double-layered signal lines and electrodes of the liquid crystal display device includes a first layer of one of aluminum (Al), aluminum alloy (Al-alloy), titanium (Ti), titanium alloy (Ti-alloy), tantalum (Ta), and a tantalum alloy (Ta-alloy) and a second layer of copper (Cu).

    Abstract translation: 用于形成液晶显示装置的双层信号线和电极的蚀刻剂包括过氧化氢(H 2 O 2),磷酸盐,F-离子,具有羧基的有机酸(-COOH),铜(Cu)抑制剂, 和二氧化氢(H 2 O 2)稳定剂,其中液晶显示装置的双层信号线和电极中的每一个包括铝(Al),铝合金(Al合金),钛(Ti) ,钛合金(Ti合金),钽(Ta)和钽合金(Ta合金)和第二铜(Cu)层。

    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof
    2.
    发明申请
    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof 有权
    具有双层金属结构的液晶显示装置用阵列基板及其制造方法

    公开(公告)号:US20040263746A1

    公开(公告)日:2004-12-30

    申请号:US10878516

    申请日:2004-06-29

    Abstract: An array substrate for a liquid crystal display device includes a gate electrode, a gate line and a gate pad electrode disposed on a substrate, each of the gate electrode, the gate line and the gate pad electrode having a first metal barrier layer, a first copper alloy layer, and a first out-diffusion film, and the first out-diffusion film completely covering, surrounding and contacting entire surfaces of the first copper alloy layer. The array substrate includes a gate insulation layer disposed on the substrate and covering the gate electrode, the gate line and the gate pad electrode. An active layer and an ohmic contact layer are sequentially formed on the gate insulation layer and over the gate electrode. A data line is formed on the gate insulation layer and perpendicularly crosses the gate line. A source electrode and a drain electrode contact the ohmic contact layer.

    Abstract translation: 用于液晶显示装置的阵列基板包括栅电极,栅极线和设置在基板上的栅极焊盘电极,栅极电极,栅极线和栅极焊盘电极中的每一个具有第一金属阻挡层,第一 铜合金层和第一外扩散膜,第一外扩散膜完全覆盖,包围并接触第一铜合金层的整个表面。 阵列基板包括设置在基板上并覆盖栅极,栅极线和栅极焊盘电极的栅极绝缘层。 有源层和欧姆接触层依次形成在栅极绝缘层上和栅电极上。 数据线形成在栅极绝缘层上并垂直于栅极线。 源电极和漏极接触欧姆接触层。

    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof
    3.
    发明申请
    Array substrate for LCD device having double-layered metal structure and manufacturing method thereof 有权
    具有双层金属结构的液晶显示装置用阵列基板及其制造方法

    公开(公告)号:US20040263706A1

    公开(公告)日:2004-12-30

    申请号:US10875559

    申请日:2004-06-25

    CPC classification number: G02F1/136286 G02F2001/13629 G02F2001/136295

    Abstract: The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad on a substrate, wherein the gate electrode, the gate line and the gate pad have a double-layered structure consisting of a first metal layer and a first barrier metal layer in series from the substrate, and wherein the first metal is one of aluminum and aluminum alloy; a gate insulation layer on the substrate covering the gate electrode, gate line and gate pad; an active layer and an ohmic contact layer sequentially formed on the gate insulation layer and over the gate electrode; a data line on the gate insulation layer perpendicularly crossing the gate line, source and drain electrodes contacting the ohmic contact layer, and a data pad on the gate insulation layer, wherein the data line, the source and drain electrode and the data pad have a double-layered structure consisting of a second barrier metal layer and a second metal layer of copper; a passivation layer formed on the gate insulation layer to cover the data line, source and drain electrodes, and data pad, wherein the passivation layer has a drain contact hole exposing a portion of the drain electrode, a gate pad contact hole exposing a portion of the gate pad, and a data pad contact hole exposing a portion of the data pad; and a pixel electrode, a gate pad terminal and a data pad terminal on the passivation layer, all of which are formed of a transparent conductive material on the passivation layer.

    Abstract translation: 本发明是一种用于液晶显示装置的阵列基板,其包括在基板上的栅电极,栅极线和栅极焊盘,其中栅电极,栅极线和栅极焊盘具有双层 结构由第一金属层和与基板串联的第一阻挡金属层组成,其中第一金属是铝和铝合金之一; 覆盖栅电极,栅极线和栅极焊盘的基板上的栅极绝缘层; 依次形成在栅极绝缘层上和栅电极上的有源层和欧姆接触层; 垂直于栅极线的栅极绝缘层上的数据线,与欧姆接触层接触的源极和漏极以及栅极绝缘层上的数据焊盘,其中数据线,源极和漏极以及数据焊盘具有 由第二阻挡金属层和铜的第二金属层组成的双层结构; 形成在所述栅极绝缘层上以覆盖所述数据线,源极和漏极以及数据焊盘的钝化层,其中所述钝化层具有暴露所述漏电极的一部分的漏极接触孔, 栅极焊盘和暴露数据焊盘的一部分的数据焊盘接触孔; 以及钝化层上的像素电极,栅极焊盘端子和数据焊盘端子,所有这些都由钝化层上的透明导电材料形成。

    Liquid crystal display device and method of fabricating the same
    4.
    发明申请
    Liquid crystal display device and method of fabricating the same 有权
    液晶显示装置及其制造方法

    公开(公告)号:US20040125279A1

    公开(公告)日:2004-07-01

    申请号:US10448174

    申请日:2003-05-30

    CPC classification number: G02F1/13394 G02F1/133512

    Abstract: A liquid crystal display device includes a substrate, a black matrix layer on the substrate and having a first plurality of openings, a color filter layer on the black matrix layer and having a second plurality of openings, and a plurality of column spacers each contacting the substrate through the first plurality and second plurality of openings.

    Abstract translation: 一种液晶显示装置,包括基板,在基板上具有第一多个开口的黑矩阵层,黑矩阵层上的滤色器层,并具有第二多个开口,以及多个柱间隔件, 基板通过第一多个和第二多个开口。

Patent Agency Ranking