公开(公告)号：US20030124851A1

公开(公告)日：2003-07-03

申请号：US10331726

申请日：2002-12-31

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Gyoo-Chul Jo ,  Gee-Sung Chae ,  Yong-Sup Hwang ,  Oh-Nam Kwon ,  Kyoung-Mook Lee ,  Kui-Jong Baek ,  Tai-Hyung Rhee

IPC: H01L021/00 ,  H01L021/302

CPC classification number: H01L21/32134 ,  C23F1/18 ,  C23F1/26 ,  Y10S436/80

Abstract: An etching solution for etching one of a copper single metal layer and a copper (Cu)/titanium (Ti) double metal layer that serves as one of a gate electrode, a source electrode, and a drain electrode of a thin film transistor for a liquid crystal display (LCD) device includes oxone, fluoric compounds, one of a reducing agent and a weak oxidizing agent, an etching rate restrainer, KHF2, and water.

Abstract translation: 一种蚀刻溶液，用于蚀刻用作薄膜晶体管的栅电极，源电极和漏电极之一的铜单金属层和铜（Cu）/钛（Ti）双金属层之一， 液晶显示器（LCD）装置包括牛酮，氟化合物，还原剂和弱氧化剂之一，蚀刻速率抑制剂，KHF 2和水。

公开(公告)号：US20040262569A1

公开(公告)日：2004-12-30

申请号：US10867007

申请日：2004-06-15

Applicant: LG.PHILIPS LCD CO., LTD.

Inventor： Won-Ho Cho ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

IPC: C09K013/00

CPC classification number: C09K13/00 ,  C23F1/18 ,  C23F1/44 ,  G02F2001/13629 ,  H01L21/32134 ,  H01L27/124

Abstract: An etchant for forming double-layered signal lines and electrodes of a liquid crystal display device includes hydrogen peroxide (H2O2), a phosphate, F-ions, an organic acid having a carboxyl group (nullCOOH), a copper (Cu) inhibitor, and a hydrogen peroxide (H2O2) stabilizer, wherein each of the double-layered signal lines and electrodes of the liquid crystal display device includes a first layer of one of aluminum (Al), aluminum alloy (Al-alloy), titanium (Ti), titanium alloy (Ti-alloy), tantalum (Ta), and a tantalum alloy (Ta-alloy) and a second layer of copper (Cu).

Abstract translation: 用于形成液晶显示装置的双层信号线和电极的蚀刻剂包括过氧化氢（H 2 O 2），磷酸盐，F-离子，具有羧基的有机酸（-COOH），铜（Cu）抑制剂， 和二氧化氢（H 2 O 2）稳定剂，其中液晶显示装置的双层信号线和电极中的每一个包括铝（Al），铝合金（Al合金），钛（Ti） ，钛合金（Ti合金），钽（Ta）和钽合金（Ta合金）和第二铜（Cu）层。

公开(公告)号：US20040115950A1

公开(公告)日：2004-06-17

申请号：US10669467

申请日：2003-09-25

Applicant: LG.Philips LCD Co. Ltd.

Inventor： Gee-Sung Chae ,  Gyoo-Chul Jo ,  Yong-Sup Hwang

IPC: H01L021/302 ,  H01L021/461

CPC classification number: H01L29/66765 ,  H01L21/0332 ,  H01L21/0337 ,  H01L21/28123 ,  H01L21/32134 ,  H01L21/32135 ,  H01L21/32139

Abstract: A pattern forming method includes: forming an etching-subject layer on a substrate; forming a Ti layer on the etching-subject layer; forming a TiOx layer by irradiating light on a portion of the Ti layer using a mask; etching the Ti layer to form a TiOx pattern; etching the etching-subject layer using the TiOx pattern as a mask; and removing the TiOx pattern.

Abstract translation: 图案形成方法包括：在基板上形成蚀刻对象层; 在蚀刻对象层上形成Ti层; 通过使用掩模在所述Ti层的一部分上照射光来形成TiO x层; 蚀刻Ti层以形成TiOx图案; 使用TiOx图案作为掩模蚀刻蚀刻对象层; 并去除TiOx图案。

公开(公告)号：US20040263746A1

公开(公告)日：2004-12-30

申请号：US10878516

申请日：2004-06-29

Applicant: LG.PHILIPS LCD CO., LTD.

Inventor： Won-Ho Cho ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

IPC: G02F001/1343

CPC classification number: G02F1/13439 ,  G02F1/1368 ,  H01L27/12 ,  H01L27/124 ,  H01L27/1248 ,  H01L29/458 ,  H01L29/4908

Abstract: An array substrate for a liquid crystal display device includes a gate electrode, a gate line and a gate pad electrode disposed on a substrate, each of the gate electrode, the gate line and the gate pad electrode having a first metal barrier layer, a first copper alloy layer, and a first out-diffusion film, and the first out-diffusion film completely covering, surrounding and contacting entire surfaces of the first copper alloy layer. The array substrate includes a gate insulation layer disposed on the substrate and covering the gate electrode, the gate line and the gate pad electrode. An active layer and an ohmic contact layer are sequentially formed on the gate insulation layer and over the gate electrode. A data line is formed on the gate insulation layer and perpendicularly crosses the gate line. A source electrode and a drain electrode contact the ohmic contact layer.

Abstract translation: 用于液晶显示装置的阵列基板包括栅电极，栅极线和设置在基板上的栅极焊盘电极，栅极电极，栅极线和栅极焊盘电极中的每一个具有第一金属阻挡层，第一 铜合金层和第一外扩散膜，第一外扩散膜完全覆盖，包围并接触第一铜合金层的整个表面。 阵列基板包括设置在基板上并覆盖栅极，栅极线和栅极焊盘电极的栅极绝缘层。 有源层和欧姆接触层依次形成在栅极绝缘层上和栅电极上。 数据线形成在栅极绝缘层上并垂直于栅极线。 源电极和漏极接触欧姆接触层。

公开(公告)号：US20040263706A1

公开(公告)日：2004-12-30

申请号：US10875559

申请日：2004-06-25

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Won-Ho Cho ,  Gyoo-Chul Jo ,  Gue-Tai Lee ,  Jin-Gyu Kang ,  Beung-Hwa Jeong ,  Jin-Young Kim

IPC: G02F001/136

CPC classification number: G02F1/136286 ,  G02F2001/13629 ,  G02F2001/136295

Abstract: The present invention is an array substrate for use in a liquid crystal display device, which includes a gate electrode, a gate line and a gate pad on a substrate, wherein the gate electrode, the gate line and the gate pad have a double-layered structure consisting of a first metal layer and a first barrier metal layer in series from the substrate, and wherein the first metal is one of aluminum and aluminum alloy; a gate insulation layer on the substrate covering the gate electrode, gate line and gate pad; an active layer and an ohmic contact layer sequentially formed on the gate insulation layer and over the gate electrode; a data line on the gate insulation layer perpendicularly crossing the gate line, source and drain electrodes contacting the ohmic contact layer, and a data pad on the gate insulation layer, wherein the data line, the source and drain electrode and the data pad have a double-layered structure consisting of a second barrier metal layer and a second metal layer of copper; a passivation layer formed on the gate insulation layer to cover the data line, source and drain electrodes, and data pad, wherein the passivation layer has a drain contact hole exposing a portion of the drain electrode, a gate pad contact hole exposing a portion of the gate pad, and a data pad contact hole exposing a portion of the data pad; and a pixel electrode, a gate pad terminal and a data pad terminal on the passivation layer, all of which are formed of a transparent conductive material on the passivation layer.

Abstract translation: 本发明是一种用于液晶显示装置的阵列基板，其包括在基板上的栅电极，栅极线和栅极焊盘，其中栅电极，栅极线和栅极焊盘具有双层 结构由第一金属层和与基板串联的第一阻挡金属层组成，其中第一金属是铝和铝合金之一; 覆盖栅电极，栅极线和栅极焊盘的基板上的栅极绝缘层; 依次形成在栅极绝缘层上和栅电极上的有源层和欧姆接触层; 垂直于栅极线的栅极绝缘层上的数据线，与欧姆接触层接触的源极和漏极以及栅极绝缘层上的数据焊盘，其中数据线，源极和漏极以及数据焊盘具有 由第二阻挡金属层和铜的第二金属层组成的双层结构; 形成在所述栅极绝缘层上以覆盖所述数据线，源极和漏极以及数据焊盘的钝化层，其中所述钝化层具有暴露所述漏电极的一部分的漏极接触孔， 栅极焊盘和暴露数据焊盘的一部分的数据焊盘接触孔; 以及钝化层上的像素电极，栅极焊盘端子和数据焊盘端子，所有这些都由钝化层上的透明导电材料形成。

公开(公告)号：US20040119902A1

公开(公告)日：2004-06-24

申请号：US10631725

申请日：2003-08-01

Applicant: LG.Philips LCD Co., Ltd.

Inventor： Gee-Sung Chae ,  Gyoo-Chul Jo ,  Yong-Sup Hwang

IPC: G02F001/136

CPC classification number: G02F1/1368 ,  G02F2001/136295

Abstract: A liquid crystal display device includes a plurality of gate lines and data lines on a first substrate defining a plurality of pixel regions, a thin film transistor within the pixel regions, a pixel electrode within the pixel regions, and at least one TiOx layer provided with the thin film transistor.

Abstract translation: 一种液晶显示装置包括在限定多个像素区域的第一基板上的多条栅极线和数据线，像素区域内的薄膜晶体管，像素区域内的像素电极以及设置有像素区域的至少一个TiO x层 薄膜晶体管。