公开(公告)号：US20030007143A1

公开(公告)日：2003-01-09

申请号：US09974520

申请日：2001-10-09

Applicant: LITEL INSTRUMENTS

Inventor： Bruce B. McArthur ,  Adlai H. Smith

IPC: G01J001/00

CPC classification number: G01M11/0264 ,  G01J9/00 ,  G01M11/0207 ,  G03F7/70591 ,  G03F7/706

Abstract: A process of measuring the radiant intensity profile of an effective source of a projection image system that has an effective source, an object plane, an imaging objective, an exit pupil, and an image plane. The improved process consists of selecting at least one field point and a corresponding aperture plane aperture and projecting a plurality of images of the selected field point through the corresponding selected aperture plane aperture at a plurality of various intensities of the effective source. By analyzing the recorded images of the effective source at various intensities it is possible to determine a radiant intensity profile of the image source at the selected field point.

Abstract translation: 测量具有有效源，物平面，成像物镜，出射光瞳和图像平面的投影图像系统的有效光源的辐射强度分布的过程。 改进的过程包括选择至少一个场点和对应的孔径平面孔径，并且以有效源的多个不同强度的多个强度投射所选择的场点的多个图像通过对应的所选孔径平面孔径。 通过以各种强度分析有效源的记录图像，可以在所选择的场点确定图像源的辐射强度分布。