公开(公告)号：US20020159207A1

公开(公告)日：2002-10-31

申请号：US10174187

申请日：2002-06-17

Applicant: Lambda Physik AG.

Inventor： Kay Zimmerman ,  Ulrich Rebhan

IPC: H02H003/00

CPC classification number: F24F7/00 ,  B23K26/1435 ,  B23K26/1438

Abstract: A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for exciter lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.

Abstract translation: 公开了用于工业激光系统的通风系统，其可以使正常操作期间所需的冷却空气进入最小化。 即使外壳打开，仍保持足够的通风。 各种传感器监测冷却空气的状况，如果冷却或安全需要，可以增加进气口。 这种通风系统对于微光刻应用中的激光器激光器具有特别的优点，因为经过激光装置的实际需要来控制空气净化室空气的消耗。