公开(公告)号：US20160146594A1

公开(公告)日：2016-05-26

申请号：US14947368

申请日：2015-11-20

Applicant: MITUTOYO CORPORATION

Inventor： Yukimasa NISHIO ,  Toshikazu IWATA ,  Eisuke MORIUCHI

IPC: G01B11/02

CPC classification number: G01B11/25 ,  G01B21/047

Abstract: An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.

Abstract translation: 一种图像测量装置，包括具有放置在其上放置被测量物体的放置面的样品台; 面向所述样品台的放置表面并捕获被测量物体的图像的图像捕获设备; 以及将预定图案投影到样品台上的图案投影装置，所述预定图案为放置表面上的要测量对象的放置位置和方向中的至少一个提供基准。