FOCUS DETECTION UNIT AND OPTICAL APPARATUS
    1.
    发明申请
    FOCUS DETECTION UNIT AND OPTICAL APPARATUS 有权
    聚焦检测单元和光学设备

    公开(公告)号:US20150346475A1

    公开(公告)日:2015-12-03

    申请号:US14718349

    申请日:2015-05-21

    CPC classification number: G02B21/244 G02B7/34 G02B7/38 G02B21/245

    Abstract: A focus detection unit to adjust a focal point of an image, of an object, formed by an optical system includes a first output section, a second output section, and a projection optical system. The first output section includes a first light modulation element configured to generate a first pattern image based on incident light and is configured to output the generated first pattern image. The second output section includes a second light modulation element configured to generate a second pattern image based on incident light and is configured to output the generated second pattern image. The projection optical system is configured to project the output first pattern image and the output second pattern image such that the output first pattern image and the output second pattern image have a predetermined positional relationship at an in-focus position of the optical system.

    Abstract translation: 调整由光学系统形成的物体的焦点的焦点检测单元包括第一输出部分,第二输出部分和投影光学系统。 第一输出部包括:第一光调制元件,被配置为基于入射光生成第一图案图像,并且被配置为输出所生成的第一图案图像。 第二输出部分包括第二光调制元件,其被配置为基于入射光产生第二图案图像,并且被配置为输出所生成的第二图案图像。 投影光学系统被配置为投影输出第一图案图像和输出第二图案图像,使得输出第一图案图像和输出第二图案图像在光学系统的对焦位置处具有预定的位置关系。

    IMAGE MEASURING APPARATUS AND MEASURING APPARATUS
    2.
    发明申请
    IMAGE MEASURING APPARATUS AND MEASURING APPARATUS 审中-公开
    图像测量装置和测量装置

    公开(公告)号:US20160146594A1

    公开(公告)日:2016-05-26

    申请号:US14947368

    申请日:2015-11-20

    CPC classification number: G01B11/25 G01B21/047

    Abstract: An image measuring apparatus includes a sample stage having a placement surface on which an object to be measured is placed; an image capture apparatus facing the placement surface of the sample stage and capturing an image of the object to be measured; and a pattern projection apparatus projecting a predetermined pattern onto the sample stage, the predetermined pattern providing a reference for at least one of a placement position and direction of the object to be measured on the placement surface.

    Abstract translation: 一种图像测量装置,包括具有放置在其上放置被测量物体的放置面的样品台; 面向所述样品台的放置表面并捕获被测量物体的图像的图像捕获设备; 以及将预定图案投影到样品台上的图案投影装置,所述预定图案为放置表面上的要测量对象的放置位置和方向中的至少一个提供基准。

    SHAPE MEASURING APPARATUS
    3.
    发明申请
    SHAPE MEASURING APPARATUS 有权
    形状测量装置

    公开(公告)号:US20140253724A1

    公开(公告)日:2014-09-11

    申请号:US14197715

    申请日:2014-03-05

    CPC classification number: G01B11/24 G01B11/005 G01B11/25

    Abstract: A shape measuring apparatus includes: an irradiating part configured to irradiate work with a linear line laser, the irradiating part including: a light source configured to produce laser light; a first optical member configured to linearly spread the laser light from the light source and generate the line laser; and a second optical member, provided between the light source and the first optical member, configured to adjust an area of irradiation with a line laser on the work; a first sensor configured to receive a line laser reflected by the work and capture an image of the work; a lens configured to form an image of a line laser reflected by the work on an imaging surface of the first sensor; and a control part configured to control adjustment of the area of irradiation with the line laser on the work by the second optical member.

    Abstract translation: 一种形状测量装置,包括:被配置为用线性激光照射加工的照射部,所述照射部包括:被配置为产生激光的光源; 第一光学构件,其被配置为从所述光源线性地扩展所述激光并产生所述线激光; 以及第二光学构件,设置在所述光源和所述第一光学构件之间,被配置为调节所述工件上的线激光的照射面积; 第一传感器,被配置为接收由所述工件反射的线激光并捕获所述工件的图像; 配置为在第一传感器的成像表面上形成由工件反射的线激光的图像的透镜; 以及控制部,被配置为控制由所述线激光对所述第二光学部件的作业的照射区域的调整。

    LED RING LIGHT AND MANUFACTURE METHOD OF LED RING LIGHT AND IMAGE MEASURING DEVICE AND OPTICAL DEVICE USING LED RING LIGHT
    4.
    发明申请
    LED RING LIGHT AND MANUFACTURE METHOD OF LED RING LIGHT AND IMAGE MEASURING DEVICE AND OPTICAL DEVICE USING LED RING LIGHT 审中-公开
    LED环灯和LED照明灯的制造方法和图像测量装置和使用LED环的光学装置

    公开(公告)号:US20160147055A1

    公开(公告)日:2016-05-26

    申请号:US14947401

    申请日:2015-11-20

    CPC classification number: G02B21/084

    Abstract: An LED ring light including a holding frame having a generally annular shape in a plan view and an aperture into which an objective lens can be inserted around a center of the holding frame; an LED substrate held inside the holding frame in a generally frusto-conical shape; and a plurality of LEDs arranged on an inner circumferential surface of the LED substrate. The LED substrate is divided at a plurality of locations in a circumferential direction of the inner circumferential surface of the holding frame by arranging a plurality of substrates side by side.

    Abstract translation: 一种LED环形灯,包括在平面图中具有大致环形形状的保持框和可围绕所述保持框的中心插入物镜的孔; 保持框架内的大致截头圆锥形状的LED基板; 以及布置在所述LED基板的内周面上的多个LED。 LED基板通过并排布置多个基板而在保持框架的内周面的圆周方向上的多个位置分割。

    SHAPE MEASURING APPARATUS
    5.
    发明申请
    SHAPE MEASURING APPARATUS 审中-公开
    形状测量装置

    公开(公告)号:US20140232855A1

    公开(公告)日:2014-08-21

    申请号:US14184132

    申请日:2014-02-19

    CPC classification number: G01B11/2518 G01B11/007

    Abstract: A shape measuring apparatus includes a first light source, a second light source, an optical system, an image capturer, and a controller. The first light source emits visible light. The second light source emits measurement light used in a measurement. The optical system emits the visible light and the measurement light at the same position on a work piece. The image capturer captures an image of the measurement light reflected by the work piece. The controller is configured to cause the emission of the visible light onto the work piece with the first light source when determining a measurement position, and to control the emission of the measurement light onto the work piece with the second light source when making the measurement.

    Abstract translation: 一种形状测量装置,包括第一光源,第二光源,光学系统,图像捕获器和控制器。 第一个光源发出可见光。 第二光源发射测量中使用的测量光。 光学系统将可见光和测量光发射到工件上相同的位置。 图像捕获器捕获由工件反射的测量光的图像。 控制器被配置为在确定测量位置时使用第一光源将可见光发射到工件上,并且在进行测量时控制用第二光源将测量光发射到工件上。

    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS
    6.
    发明申请
    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS 审中-公开
    光学探头,连接盖和形状测量装置

    公开(公告)号:US20150226544A1

    公开(公告)日:2015-08-13

    申请号:US14612480

    申请日:2015-02-03

    CPC classification number: G01B11/24 G01B11/026 G02B1/11 G02B5/0278

    Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. In addition, a light reflection prevention structure or a diffusion structure is provided to the bottom surface of the probe cover. Light reflected from the work piece is prevented from reflecting off the bottom surface by the reflection prevention structure, or the reflected light is diffused by the diffusion structure. Accordingly, an occurrence of an erroneous value in received light distribution due to second order reflected light can be inhibited.

    Abstract translation: 光探头包括探针盖,在其中安装有具有照明光学系统和接收光学系统的光学系统。 发光区域和光通过的入射区域被提供到探针盖的底表面,底面形成与工件相对的相对区域。 此外,在探针盖的底面设置有光反射防止结构或扩散结构。 通过防反射结构防止从工件反射的光从底面反射,或者反射光被扩散结构扩散。 因此,可以抑制由于二次反射光引起的接收光分布中的错误值的发生。

    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS
    7.
    发明申请
    OPTICAL PROBE, ATTACHABLE COVER, AND SHAPE MEASURING APPARATUS 有权
    光学探头,连接盖和形状测量装置

    公开(公告)号:US20150226543A1

    公开(公告)日:2015-08-13

    申请号:US14612467

    申请日:2015-02-03

    Abstract: An optical probe includes a probe cover, within which is installed an optical system having an illuminating optical system and a receiving optical system. An emitting region and an incidence region through which light passes are provided to a bottom surface of the probe cover, the bottom surface forming an opposing region opposite a work piece. The bottom surface forms a surface where, of the light reflected from the work piece, light following a direct reflection direction is reflected in a direction moving away from the incidence region, from a position where light emitted from the emitting region is emitted at the work piece. Accordingly, an amount of second order reflected light striking the incidence region can be suppressed and, therefore, an occurrence of an erroneous value in received light distribution can be suppressed.

    Abstract translation: 光探头包括探针盖,在其中安装有具有照明光学系统和接收光学系统的光学系统。 发光区域和光通过的入射区域被提供到探针盖的底表面,底面形成与工件相对的相对区域。 底表面形成一个表面,其中从工件反射的光,沿着直接反射方向的光沿着从入射区域移开的方向从在发光区域发射的光在工作中发射的位置被反射 片。 因此,可以抑制入射入射区域的二次反射光的量,因此能够抑制接收光分布中的错误值的发生。

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