公开(公告)号：US20230304790A1

公开(公告)日：2023-09-28

申请号：US18120581

申请日：2023-03-13

Applicant: MITUTOYO CORPORATION

Inventor： Yumiko MORI ,  Yoshiaki KATO

IPC: G01B11/24 ,  G01B11/25 ,  G01B9/0209 ,  G06T7/521 ,  G06T7/55

CPC classification number: G01B11/2441 ,  G01B11/25 ,  G01B9/0209 ,  G06T7/521 ,  G06T7/55

Abstract: A measurement method of a surface shape includes combining N stacked images captured while scanning the measuring head. For a position in the N stacked images, from an integral curve including values of N points, which is obtained by integrating square values or absolute values of the interference signal including values at N points: a start-point-side noise part straight line that approximates a start-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the start-point-side than the measurement target surface; an end-point-side noise part straight line that approximates an end-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the end-point-side than the measurement target surface; and a surface proximity straight line that approximates surface proximity part.

公开(公告)号：US20230324168A1

公开(公告)日：2023-10-12

申请号：US18120696

申请日：2023-03-13

Applicant: MITUTOYO CORPORATION

Inventor： Yumiko MORI ,  Yoshiaki Kato

IPC: G01B11/24 ,  G01B11/06 ,  G06T7/55 ,  G06T7/60 ,  G06T7/73

CPC classification number: G01B11/0608 ,  G01B11/2441 ,  G06T7/55 ,  G06T7/60 ,  G06T7/73 ,  G06T2207/20048

Abstract: A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.---