公开(公告)号：US12061327B2

公开(公告)日：2024-08-13

申请号：US17368952

申请日：2021-07-07

Applicant: Keyence Corporation

Inventor： Kengo Yanase

IPC: G02B21/00 ,  G01B9/0209 ,  G02B9/02 ,  G02B21/36

CPC classification number: G02B21/0056 ,  G01B9/0209 ,  G02B21/361

Abstract: A white light interference microscope includes an imaging part taking interference images, a laser light source, a light receiving part receiving reflected light of laser beam from a sample via a confocal optical system and generating a light reception signal corresponding to the light receiving intensity of the reflected light, a focal calculation part calculating a focal position matching a focus of the objective lens with a surface of the sample based on the light reception signal at each height position of the stage or the objective lens, a focus adjustment part adjusting the height position of the stage or the objective lens to match with the focal position, and a first measuring part measuring the surface shape of the sample based on a plurality of interference images taken by the imaging part at a plurality of height positions defined within a height range including the focal position.

公开(公告)号：US12025828B2

公开(公告)日：2024-07-02

申请号：US18079029

申请日：2022-12-12

Applicant: OFS Fitel, LLC

Inventor： Tristan Kremp ,  Paul S. Westbrook ,  Tommy Geisler

IPC: G01B11/16 ,  G02B6/02 ,  G01B9/0209 ,  G01N21/47

CPC classification number: G02B6/02 ,  G01B11/18 ,  G02B6/02052 ,  G01B9/0209 ,  G01N21/47 ,  G02B6/0208

Abstract: A high backscattering optical fiber comprising a perturbed segment in which the perturbed segment reflects a relative power such that the optical fiber has an effective index of neff, a numerical aperture of NA, a scatter of Rp→r(fiber) that varies axially along the optical fiber, a total transmission loss of αfiber, an in-band range greater than one nanometer (1 nm), and a figure of merit (FOM) in the in-band range. The FOM being defined as:





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.

公开(公告)号：US11906302B2

公开(公告)日：2024-02-20

申请号：US18302151

申请日：2023-04-18

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François Boulanger ,  Isabelle Bergoënd

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B9/02088 ,  G01B11/0625 ,  G01B2210/56

Abstract: A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, the method including: - acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module: classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signals to derive information on the structure at the measurement points, as a function of the class of each interferometric signal.

公开(公告)号：US20190234729A1

公开(公告)日：2019-08-01

申请号：US16379512

申请日：2019-04-09

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin

IPC: G01B11/24 ,  G01B9/02

CPC classification number: G01B11/2441 ,  G01B9/02032 ,  G01B9/02049 ,  G01B9/02085 ,  G01B9/0209 ,  G01B2290/50

Abstract: System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. Determination of height profile of a region-of-interest that is incomparably larger than a FOV of the interferometer objective is performed in time reduced by at least an order of magnitude as compared to time required for the same determination by a vertical scanning interferometer.

公开(公告)号：US20190219477A1

公开(公告)日：2019-07-18

申请号：US16367778

申请日：2019-03-28

Applicant: Johnson & Johnson Vision Care, Inc.

Inventor： John E. Greivenkamp, JR. ,  James William Haywood ,  Kyle C. Heideman ,  Russell T. Spaulding ,  Gregory Allen Williby

IPC: G01M11/02 ,  G01B9/02

CPC classification number: G01M11/025 ,  G01B9/02038 ,  G01B9/0209 ,  G01M11/0214 ,  G01M11/0271

Abstract: The system and methods are made to apply interferometry to ophthalmic applications. The system makes use of a low-coherence interferometer to obtain a plurality of measurements of a contacts lens. The system and methods characterizes the surface profile of both surfaces of a contact lens, a thickness profiles, and combines these measurements with an index information to reconstruct a complete model of the contact lens.

公开(公告)号：US20190162660A1

公开(公告)日：2019-05-30

申请号：US16172910

申请日：2018-10-29

Applicant: Lumetrics, Inc.

Inventor： Michael A. MARCUS ,  Kyle J. HADCOCK ,  Donald S. GIBSON ,  Filipp V. IGNATOVICH

IPC: G01N21/45 ,  G01B11/06 ,  G01N21/41

CPC classification number: G01N21/45 ,  G01B9/02004 ,  G01B9/02007 ,  G01B9/0209 ,  G01B11/0675 ,  G01B2290/45 ,  G01B2290/60 ,  G01N21/4133 ,  G01N2021/458 ,  G01N2021/8438

Abstract: A method of identifying the material and determining the physical thickness of each layer in a multilayer structure is disclosed. The method includes measuring the optical thickness of each of the layers of the multilayer object as a function of wavelength of a light source and calculating a normalized group index of refraction dispersion curve for each layer in the multilayer structure. The measured normalized group index of refraction dispersion curves for each of the layers is then compared to a reference database of known materials and the material of each layer is identified. The physical thickness of each layer is then determined from the group index of refraction dispersion curve for the material in each layer and the measured optical thickness data. A method for determining the group index of refraction dispersion curve of a known material, and an apparatus for performing the methods are also disclosed.

公开(公告)号：US20190137260A1

公开(公告)日：2019-05-09

申请号：US16239047

申请日：2019-01-03

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tatsuo MATSUDO

IPC: G01B11/06 ,  G01B9/02 ,  H01J37/32 ,  G01K5/48

CPC classification number: G01B11/0675 ,  G01B9/02019 ,  G01B9/02021 ,  G01B9/02025 ,  G01B9/02044 ,  G01B9/0209 ,  G01K5/48 ,  H01J37/32449 ,  H01J37/32522 ,  H01J37/32642 ,  H01J37/32724 ,  H01J37/3288

Abstract: A wear amount measuring apparatus includes a light source, a light transmission unit, a first and a second irradiation unit, a spectroscope and an analysis unit. The light transmission unit splits a low-coherence light from the light source into a first and a second low-coherence light. The first and the second irradiation units irradiate the first and the second low-coherence light to the component to receive reflected lights from the component. The light transmission unit transmits the reflected lights received by the first irradiation unit and the second irradiation unit to the spectroscope. The spectroscope configured to detect intensity distribution of the reflected lights from the first and the second irradiation unit. The analysis unit calculates a thickness difference between a thickness of the component at the first measuring point and that at the second measuring point by performing Fourier transform on the intensity distribution.

公开(公告)号：US20190064502A1

公开(公告)日：2019-02-28

申请号：US15684287

申请日：2017-08-23

Applicant: Canon U.S.A., Inc.

Inventor： Alexander Altshuler ,  Badr Elmaanaoui

IPC: G02B26/00 ,  G02B23/24

CPC classification number: G02B26/005 ,  G01B9/02015 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/65 ,  G02B23/2469 ,  G02B26/10

Abstract: A rotation-free beam-steering device for manipulating probing and reflected optical beams includes at least one electrowetting cell having at least one side wall defining an inner space. The at least one side wall has a lining adjacent to the inner space. A liquid at least partially fills the inner space. The liquid has at least one controlled surface not in contact with the wall lining. The liquid further has a contact angle with the wall lining. The at least one controlled surface is disposed to interface with an optical beam exiting from a distal end of an optical fiber at an incidence angle. At least two electrodes are provided separated from the inner space by the lining. An electrical potential on the at least two electrodes is controlled to adjust the contact angle of the liquid bounding the at least one controlled surface.

公开(公告)号：US20190017804A1

公开(公告)日：2019-01-17

申请号：US16037680

申请日：2018-07-17

Applicant: Adom, Advanced Optical Technologies Ltd.

Inventor： Yoel Arieli ,  Yoel Cohen

IPC: G01B9/02

CPC classification number: G01B9/02047 ,  G01B9/0209 ,  G01B9/02091

Abstract: Apparatus and methods are described for determining tomographic and/or topographic data relating to an object. The object is illuminated with at least one wave packet from light generated by a multi-spectral light source. The wave packet is split into two split wave packets, and an optical path difference (OPD) is introduced between the two split wave packets, that is smaller than the coherence length of the wave packet. The two split wave packets are combined to generate a 2D image of the illuminated object, and the data relating to the object is determined by processing the 2D image using long coherence phase shift interferometry algorithms, by analyzing the 2D image as if the 2D image was generated using monochromatic light having a wavelength that is equal to a mean wavelength of the wave packet. Other applications are also described.

公开(公告)号：US10054420B2

公开(公告)日：2018-08-21

申请号：US15793177

申请日：2017-10-25

Applicant: INTUITIVE SURGICAL OPERATIONS, INC.

Inventor： Mark E. Froggatt ,  Alexander K. Sang ,  Dawn K. Gifford ,  Justin W. Klein

IPC: G01B9/02 ,  G01B11/06 ,  G01D5/353 ,  G01L1/24

CPC classification number: G01B9/0207 ,  G01B9/02004 ,  G01B9/02069 ,  G01B9/02072 ,  G01B9/02076 ,  G01B9/02083 ,  G01B9/0209 ,  G01B11/0658 ,  G01B11/18 ,  G01D5/35329 ,  G01D5/35358 ,  G01D5/3537 ,  G01L1/242 ,  G01M11/3172

Abstract: An optical interrogation system, e.g., an OFDR-based system, measures local changes of index of refraction of a sensing light guide subjected to a time-varying disturbance. Interferometric measurement signals detected for a length of the sensing light guide are transformed into the spectral domain. A time varying signal is determined from the transformed interferometric measurement data set. A compensating signal is determined from the time varying signal which is used to compensate the interferometric measurement data set for the time-varying disturbance. The compensation technique may be applied along the length of the light guide.