公开(公告)号：US12196551B2

公开(公告)日：2025-01-14

申请号：US17716266

申请日：2022-04-08

Applicant: AUTOMATED PRECISION INC.

Inventor： Yongwoo Park ,  Shuai Sun ,  Kam Lau

IPC: G01B9/0209 ,  G01B9/02004

Abstract: A broadband interferometry for a measurement range extension beyond a coherence length of a light source is achieved through a local oscillation of the reference beam is replicated by a cavity multiplication or cascading optical delayed lines with a fiber optic cavity, and quantifiable optical properties including a wavelength group delay, a chromatic dispersion, a polarization mode dispersion and a model dispersion are inserted into the local oscillation of the reference beam to incrementally quantify the replicated copies of the local oscillation as the number of the delayed copies of the local oscillation increase for extension of a measurement rage to the target.

公开(公告)号：US12163777B2

公开(公告)日：2024-12-10

申请号：US17754397

申请日：2020-09-21

Applicant: FOGALE NANOTECH

Inventor： Alain Courteville ,  Gilles Fresquet

IPC: G01B11/30 ,  G01B9/02001 ,  G01B9/02015 ,  G01B9/0209 ,  G01B11/24 ,  G01H9/00 ,  G03H1/00 ,  G03H1/04 ,  G03H1/08

Abstract: A device and method for measuring a surface of an object, including at least one light source, at least one optical sensor, and an interferometry device having a measurement arm and a reference arm, the former directing light from each light source towards the surface of the object and directing light from the surface towards each optical sensor; the measurement device, in an interferometry configuration, illuminating the reference arm and the measurement arm with each light source and directing the light from the measurement arm and the reference arm towards each optical sensor to form an interference signal; the measurement device, in an imaging configuration illuminating at least the measurement arm and directing the light from the measurement arm towards the optical sensor to form an image of the surface; the measurement device including a digital processor producing, from the interference signal and the image, information on the surface.

公开(公告)号：US12061327B2

公开(公告)日：2024-08-13

申请号：US17368952

申请日：2021-07-07

Applicant: Keyence Corporation

Inventor： Kengo Yanase

IPC: G02B21/00 ,  G01B9/0209 ,  G02B9/02 ,  G02B21/36

CPC classification number: G02B21/0056 ,  G01B9/0209 ,  G02B21/361

Abstract: A white light interference microscope includes an imaging part taking interference images, a laser light source, a light receiving part receiving reflected light of laser beam from a sample via a confocal optical system and generating a light reception signal corresponding to the light receiving intensity of the reflected light, a focal calculation part calculating a focal position matching a focus of the objective lens with a surface of the sample based on the light reception signal at each height position of the stage or the objective lens, a focus adjustment part adjusting the height position of the stage or the objective lens to match with the focal position, and a first measuring part measuring the surface shape of the sample based on a plurality of interference images taken by the imaging part at a plurality of height positions defined within a height range including the focal position.

公开(公告)号：US12025828B2

公开(公告)日：2024-07-02

申请号：US18079029

申请日：2022-12-12

Applicant: OFS Fitel, LLC

Inventor： Tristan Kremp ,  Paul S. Westbrook ,  Tommy Geisler

IPC: G01B11/16 ,  G02B6/02 ,  G01B9/0209 ,  G01N21/47

CPC classification number: G02B6/02 ,  G01B11/18 ,  G02B6/02052 ,  G01B9/0209 ,  G01N21/47 ,  G02B6/0208

Abstract: A high backscattering optical fiber comprising a perturbed segment in which the perturbed segment reflects a relative power such that the optical fiber has an effective index of neff, a numerical aperture of NA, a scatter of Rp→r(fiber) that varies axially along the optical fiber, a total transmission loss of αfiber, an in-band range greater than one nanometer (1 nm), and a figure of merit (FOM) in the in-band range. The FOM being defined as:





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(
fiber
)





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fiber

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⁢

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2


.

公开(公告)号：US11906302B2

公开(公告)日：2024-02-20

申请号：US18302151

申请日：2023-04-18

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François Boulanger ,  Isabelle Bergoënd

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B9/02088 ,  G01B11/0625 ,  G01B2210/56

Abstract: A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, the method including: - acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module: classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signals to derive information on the structure at the measurement points, as a function of the class of each interferometric signal.

公开(公告)号：US11435177B2

公开(公告)日：2022-09-06

申请号：US16907088

申请日：2020-06-19

Applicant: Tesseract Health, Inc.

Inventor： Tyler S. Ralston ,  Maurizio Arienzo ,  Owen Kaye-Kauderer ,  Benjamin Rosenbluth ,  Jonathan M. Rothberg ,  Lawrence C. West ,  Paul E. Glenn

IPC: G01B9/02091 ,  G01B9/0209 ,  A61B3/00 ,  A61B3/10 ,  A61B3/12 ,  G01B9/02015

Abstract: Aspects of the present disclosure provide improved techniques for imaging a subject's retina fundus. Some aspects relate to an imaging apparatus that may be substantially binocular shaped and/or may house multiple imaging devices configured to provide multiple corresponding modes of imaging the subject's retina fundus. Some aspects relate to techniques for imaging a subject's eye using white light, fluorescence, infrared (IR), optical coherence tomography (OCT), and/or other imaging modalities that may be employed by a single imaging apparatus. Some aspects relate to improvements in white light, fluorescence, IR, OCT, and/or other imaging technologies that may be employed alone or in combination with other techniques. Some aspects relate to multi-modal imaging techniques that enable determination of a subject's health status. Imaging apparatuses and techniques described herein provide medical grade retina fundus images and may be produced or conducted at low cost, thus increasing access to medical grade imaging.

公开(公告)号：US20250035426A1

公开(公告)日：2025-01-30

申请号：US18891105

申请日：2024-09-20

Applicant: Tokyo Seimitsu Co., Ltd.

Inventor： Takashi OGURA ,  Xiaonan WANG

IPC: G01B9/0209 ,  G01B9/04 ,  G01B11/24

Abstract: A three-dimensional shape measuring device includes: an interference objective lens including an interfering unit configured to separate part of measurement light as reference light and generate multiplexed light of the measurement light returning from the surface to be measured and the reference light returning from a reference surface, and an objective lens configured to cause the measurement light to focus on the surface to be measured; a scanning unit configured to cause the interference objective lens to scan relatively with respect to the surface to be measured; an image capturing unit configured to repeatedly capture an image of the multiplexed light and output a plurality of captured images during scanning; and a first signal processing unit configured to calculate the three-dimensional shape of the surface to be measured, based on a result of comparing the sharpness of each pixel on the same coordinate of the plurality of captured images.

公开(公告)号：US20240361253A1

公开(公告)日：2024-10-31

申请号：US18595292

申请日：2024-03-04

Applicant: NOVA LTD.

Inventor： Gilad BARAK ,  DANNY GROSSMAN ,  Dror SHAFIR ,  YOAV BERLATZKY ,  Yanir HAINICK

IPC: G01N21/956 ,  G01B9/02001 ,  G01B9/02015 ,  G01B9/02055 ,  G01B9/0209 ,  G01B11/06 ,  G01J3/453 ,  G01N21/88

CPC classification number: G01N21/956 ,  G01B9/02007 ,  G01B9/02032 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/0675 ,  G01J3/4535 ,  G01N21/8806 ,  G01B2210/56 ,  G01B2290/70 ,  G01N2021/8848

Abstract: A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels having a sample arm and a reference arm having a reference reflector, and is configured for inducing an optical path difference between the sample and reference arms, the detection unit for detecting a combined light beam formed by a light beam reflected from the reflector and a light beam propagating from a sample's support, and generating measured data indicative of spectral interference pattern formed by spectral interference signatures, and the control unit for receiving the measured data and applying a model-based processing to the spectral interference pattern for determining one or more parameters of the pattern in the sample.

公开(公告)号：US20230251079A1

公开(公告)日：2023-08-10

申请号：US18302151

申请日：2023-04-18

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François BOULANGER ,  Isabelle BERGOËND

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B11/0625 ,  G01B9/02088 ,  G01B2210/56

Abstract: A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, and including: —acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module:



classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and
analysing the interferometric signals to derive therefrom information on the structure at the measurement points, as a function of the class of each interferometric signal.

公开(公告)号：US11668625B2

公开(公告)日：2023-06-06

申请号：US17472047

申请日：2021-09-10

Applicant: Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences

Inventor： Peng Li ,  Feng Tang ,  Xiangzhao Wang ,  Yunjun Lu ,  Yang Liu ,  Xiangyu Wei ,  Yisha Cao ,  Changzhe Peng

IPC: G01B11/02 ,  G01M11/02 ,  G01B9/0209 ,  G02B5/08

CPC classification number: G01M11/0271 ,  G01B9/0209 ,  G02B5/08

Abstract: Apparatus and method for detecting wavefront aberration of an objective lens, comprising a wavefront detection system, a planar mirror, and a planar mirror adjusting mechanism; the objective lens is placed between planar mirror and wavefront detection system; planar mirror is positioned at focal point of the objective lens. A test wavefront emitted by wavefront detection system passes through the objective lens, gets reflected by the planar mirror, and t passes through the objective lens again; the wavefront detection system receives and detects the test wavefront to derive a phase distribution thereof; an angle of the planar mirror tilts at is adjusted to obtain different return wavefronts; a polynomial for expressing wavefront aberration is selected, and expressions corresponding to all the return wavefronts are calculated; result of fitting the wavefront aberration of the objective lens when expressed by the selected polynomial is derived through fitting with the polynomial.