公开(公告)号：US08992079B2

公开(公告)日：2015-03-31

申请号：US13478304

申请日：2012-05-23

申请人： Masayuki Moroi ,  Hitoshi Kikuchi ,  Masato Koakutsu

发明人： Masayuki Moroi ,  Hitoshi Kikuchi ,  Masato Koakutsu

IPC分类号： G01K1/14 ,  G01K13/08 ,  H01L21/00 ,  G01N25/00 ,  F27D21/00 ,  H01L21/67 ,  H01L21/687 ,  F27D19/00 ,  F27B17/00

CPC分类号： G01N25/00 ,  F27B17/0025 ,  F27D19/00 ,  F27D21/00 ,  F27D2019/0025 ,  H01L21/67248 ,  H01L21/68764 ,  H01L21/68771

摘要： A temperature measurement apparatus for estimating a temperature profile in a process container, includes a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas at a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; an operation control unit that controls to start heating of the process container by a heater while keeping the rotating table immobilized, and controls to repeat a scanning operation, in which the radiation temperature measurement unit scans the surface of the rotating table in the radius direction to obtain the temperature of the plural temperature measurement areas while the rotating table is rotated in a circumferential direction of the rotating table, after a predetermined period has passed from starting the heating of the process container.

摘要翻译： 一种用于估计处理容器中的温度分布的温度测量装置，包括：辐射温度测量单元，被配置为通过扫描旋转台的表面在旋转台的半径方向上测量旋转台的表面处的多个温度测量区域的温度 旋转台在半径方向; 操作控制单元，其通过加热器控制开始加热处理容器，同时保持旋转台的固定，并且控制重复扫描操作，其中辐射温度测量单元将半径方向上的旋转台的表面扫描到 在开始处理容器的加热经过预定时间之后，在旋转台沿旋转台的圆周方向旋转的同时，获得多个温度测量区域的温度。