公开(公告)号：US20160116271A1

公开(公告)日：2016-04-28

申请号：US14521440

申请日：2014-10-22

Applicant: NATIONAL APPLIED RESEARCH LABORATORIES

Inventor： Ming-Hsing SHEN ,  Wei-Chung WANG ,  Chi-Hung HUANG ,  Jyh-Rou SZE ,  Chun-Li CHANG

IPC: G01B9/02 ,  G01J3/447 ,  G01J3/45

CPC classification number: G01B9/02042 ,  G01B9/02044 ,  G01B9/0209 ,  G01J3/447 ,  G01J3/45 ,  G02B21/0024

Abstract: The conventional white-light interferometer, confocal microscope, and ellipsometer are integrated as one device set in a functional sense, and the geometrical parameters conventionally measured may be deduced on the integrated device. Thus, the advantages and efficacies of equipment cost saving, on-line measuring, rapid monitoring, reduced manufacturing time, and reduced possibility of object damage during the manufacturing process may be secured, compared with the prior art.

Abstract translation: 传统的白光干涉仪，共聚焦显微镜和椭偏仪被集成为功能意义上的一个装置，并且可以在集成装置上推导传统测量的几何参数。 因此，与现有技术相比，可以确保设备成本节省，在线测量，快速监测，缩短制造时间以及减少制造过程中物体损坏可能性的优点和功效。