公开(公告)号：US20160154042A1

公开(公告)日：2016-06-02

申请号：US14905591

申请日：2014-03-13

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Kazuya KIKUNAGA ,  Kazuhiro NONAKA

IPC: G01R29/24 ,  G01R29/14

CPC classification number: G01R29/24 ,  G01H11/06 ,  G01R29/0878 ,  G01R29/14 ,  G01V3/088 ,  G06F1/00 ,  G06T11/206 ,  H01L21/00 ,  H01L2221/00

Abstract: A static electricity distribution measuring apparatus (1) according to the present disclosure measures the static electricity distribution on a measurement surface of a measurement target (200), and is provided with: an array antenna (2) that receives electric fields generated from each of a plurality of areas (211) on the measurement surface through vibration; a vibrator (3) that vibrates the measurement target (200) or the array antenna (2); a measurer (4) that measures at least one from among intensity, frequency and phase of the electric fields in each of the plurality of areas (211) received by the array antenna (2); a calculator (5) that calculates an amount of static electricity for each of the plurality of areas (211) based on measurement results by the measurer (4); and a drawer (6) that draws the static electricity distribution on the measurement surface based on the amount of static electricity in each of the plurality of areas (211). The array antenna (2) has a plurality of antenna elements (21) respectively corresponding to the plurality of areas (211).

Abstract translation: 根据本公开的静电分配测量装置（1）测量测量目标（200）的测量表面上的静电分布，并且设置有：阵列天线（2），其接收从每个 通过振动在所述测量表面上的多个区域（211）; 振动器（3），其使测量对象（200）或阵列天线（2）振动; 测量器（4），其从所述阵列天线（2）接收的所述多个区域（211）中的每一个中测量电场的强度，频率和相位中的至少一个; 计算器（5），其基于测量器（4）的测量结果来计算多个区域（211）中的每一个的静电量; 以及抽屉（6），其基于所述多个区域（211）中的每一个区域中的静电量，在测量表面上绘制静电分布。 阵列天线（2）具有分别对应于多个区域（211）的多个天线元件（21）。