公开(公告)号：US20220032501A1

公开(公告)日：2022-02-03

申请号：US17451204

申请日：2021-10-18

Applicant: NGK INSULATORS, LTD.

Inventor： Yasuho AOKI ,  Masashi ONO

IPC: B28B7/34 ,  B33Y80/00 ,  B28B11/24 ,  B28B1/14

Abstract: A method for manufacturing a three-dimensional fired body includes (a) a step of producing a shaping mold using an organic material, the shaping mold having a shaping space which has the same shape as a shaped body having a hollow portion that opens to an outer surface thereof, in which a core corresponding to the hollow portion is integrated with the shaping mold; (b) a step of producing the shaped body in the shaping mold by pouring a ceramic slurry into the shaping space and solidifying the ceramic slurry; (c) a step of drying and then degreasing the shaped body, in which the shaping mold is eliminated in any one of the following stages: before drying, during drying, after drying and before degreasing, during degreasing, and after degreasing of the shaped body; and (d) a step of firing the shaped body to obtain a three-dimensional fired body.

公开(公告)号：US20130078326A1

公开(公告)日：2013-03-28

申请号：US13623990

申请日：2012-09-21

Applicant: NGK Insulators, Ltd.

Inventor： Yuichi TAJIMA ,  Masashi ONO

IPC: B29C47/08

CPC classification number: B28B3/22 ,  B28B11/161 ,  B29C47/0028 ,  B29C47/0035 ,  B29C47/0076

Abstract: An extruder comprises an extruding section, a chamber drum, and a forming section. The extruding section kneads and extrudes a kneaded material including a ceramic raw material. The chamber drum includes a first space portion which extends from the extrusion port side of the extruding section in an extruding direction and allows the kneaded material to flow in the extruding direction, and a second space portion which extends from a downstream side of the first space portion in a downward direction, allows the kneaded material to flow in the downward direction different from the extruding direction, and has a discharge port to discharge the kneaded material. The forming section includes a die through which the kneaded material discharged through the discharge port of the chamber drum is pushed out, to extrude and form ceramic formed bodies.

Abstract translation: 挤出机包括挤出部分，室鼓和成形部分。 挤出部分捏合并挤出包括陶瓷原料的捏合材料。 室鼓包括第一空间部分，其沿挤出方向从挤出部分的挤出口侧延伸并允许捏合材料沿挤出方向流动，第二空间部分从第一空间的下游侧延伸 使捏合材料沿与挤出方向不同的向下方向流动，并且具有用于排出捏合材料的排出口。 成形部包括将从室鼓的排出口排出的混炼物推出的模具，挤出并形成陶瓷成形体。

公开(公告)号：US20240213052A1

公开(公告)日：2024-06-27

申请号：US18520954

申请日：2023-11-28

Applicant: NGK INSULATORS, LTD.

Inventor： Hideaki HASHIMOTO ,  Masashi ONO ,  Michihiro ASHIDA

IPC: H01L21/67 ,  H01L21/683

CPC classification number: H01L21/67103 ,  H01L21/6833

Abstract: A plug includes a plug body, a spiral gas flow path that is provided in the plug body and that extends from a lower surface of the plug body to an upper surface, and at least one branch path that branches from a position on the spiral gas flow path and that opens on an outer circumferential surface of the plug body or that is in communication with another spiral gas flow path that differs from the spiral gas flow path and that extends from a lower surface of the plug body to an upper surface.

公开(公告)号：US20240213082A1

公开(公告)日：2024-06-27

申请号：US18526061

申请日：2023-12-01

Applicant: NGK INSULATORS, LTD.

Inventor： Hideaki HASHIMOTO ,  Masashi ONO ,  Michihiro ASHIDA

IPC: H01L21/687 ,  H01J37/32

CPC classification number: H01L21/68785 ,  H01J37/32715 ,  H01L21/68757 ,  H01J2237/20235

Abstract: A member for semiconductor manufacturing apparatus includes a ceramic plate that has an upper surface that includes a wafer placement portion, and a plug that is installed in a plug installation hole extending through the ceramic plate in an up-down direction and that allows gas to pass therethrough, wherein the plug has a gas flow path that includes a plurality of linear flow paths that is combined such that the plurality of linear flow paths intersects with each other in a plug body, and wherein the gas flow path includes a plurality of opening portions in an upper surface and a lower surface of the plug body.