公开(公告)号：US11049688B2

公开(公告)日：2021-06-29

申请号：US16586254

申请日：2019-09-27

申请人： NuFlare Technology, Inc.

发明人： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Keita Ideno ,  Kota Iwasaki ,  Keisuke Goto ,  Kiyoshi Nakaso ,  Shintaro Yamamoto ,  Hitoshi Matsushita ,  Ryota Inoue ,  Yuki Fukuda

IPC分类号： H01J37/244 ,  H01J37/02 ,  H01J37/26 ,  H05H7/00

摘要： A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.