公开(公告)号：US11456156B2

公开(公告)日：2022-09-27

申请号：US15930828

申请日：2020-05-13

申请人： NuFlare Technology, Inc.

发明人： Keisuke Goto ,  Kiyoshi Nakaso

IPC分类号： H01J37/32 ,  H01J37/244

摘要： According to an embodiment, a charged particle beam apparatus includes a stage; a chamber; an emission source of the charged particle beam; an electronic optical system configured to emit the charged particle beam; an optical column including the emission source and the electronic optical system; a charged particle detector configured to detect a position of the charged particle beam; a first actuator configured to provide a frequency vibration to the stage based on a first excitation signal; a second actuator configured to provide a frequency vibration to the optical column based on a second excitation signal; a third actuator configured to provide a frequency vibration to the chamber based on a third excitation signal; and a controller configured to generate the first to third excitation signals.

公开(公告)号：US10607810B2

公开(公告)日：2020-03-31

申请号：US16237775

申请日：2019-01-02

申请人： NuFlare Technology, Inc.

发明人： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Kiyoshi Nakaso ,  Keita Ideno ,  Shintaro Yamamoto ,  Keisuke Goto ,  Hitoshi Matsushita ,  Hirokazu Yoshioka ,  Ryouta Inoue ,  Yuuki Fukuda

IPC分类号： H01J37/244 ,  H01J37/317 ,  H01J37/06

摘要： The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.

公开(公告)号：US11049688B2

公开(公告)日：2021-06-29

申请号：US16586254

申请日：2019-09-27

申请人： NuFlare Technology, Inc.

发明人： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Keita Ideno ,  Kota Iwasaki ,  Keisuke Goto ,  Kiyoshi Nakaso ,  Shintaro Yamamoto ,  Hitoshi Matsushita ,  Ryota Inoue ,  Yuki Fukuda

IPC分类号： H01J37/244 ,  H01J37/02 ,  H01J37/26 ,  H05H7/00

摘要： A charged particle beam irradiation apparatus according to an embodiment includes: an optical column; a stage; a mount supporting the stage; a chamber provided on the mount and supporting the optical column; a detector configured to detect movement of the stage; actuator units each including a curved plate, a piezoelectric element, and a connector connected configured to transmit a first force generated by a change of the curvature of the curved plate to the mount; and an actuator control circuit configured to control the voltage applied to the piezoelectric element of each of the actuator units based on movement information, so that the first force is transmitted from the actuator units to the mount against a second force acting on the mount due to the movement of the stage.

公开(公告)号：US20190214224A1

公开(公告)日：2019-07-11

申请号：US16237775

申请日：2019-01-02

申请人： NuFlare Technology, Inc.

发明人： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Kiyoshi Nakaso ,  Keita Ideno ,  Shintaro Yamamoto ,  Keisuke Goto ,  Hitoshi Matsushita ,  Hirokazu Yoshioka ,  Ryouta Inoue ,  Yuuki Fukuda

IPC分类号： H01J37/244 ,  H01J37/317 ,  H01J37/06

CPC分类号： H01J37/244 ,  H01J37/06 ,  H01J37/3174 ,  H01J2237/0216 ,  H01J2237/20264

摘要： The vibration control system configured to control vibration of a vibration-controlled object is disclosed. The vibration control system comprises: (i) actuator units each including a piezoelectric element configured to expand and contract; (ii) a drive power source configured to supply drive voltages to the piezoelectric elements of the actuator units for causing the piezoelectric elements to expand and contract; (iii) a vibration detector configured to detect a status of vibration of the vibration-controlled object; and (iv) a vibration controller configured to control the vibration of the vibration-controlled object by controlling the voltages supplied by the drive power source to the piezoelectric elements of the actuator units based on the status of vibration detected by the vibration detector, respectively.