公开(公告)号：US20170199030A1

公开(公告)日：2017-07-13

申请号：US15469146

申请日：2017-03-24

Applicant: OLYMPUS CORPORATION

Inventor： Yuki TAKAHASHI ,  Hiroyuki SEKI ,  Masahiro UEHARA

IPC: G01B11/25

CPC classification number: G01B11/2518 ,  G01B5/0004 ,  G01B11/24 ,  G01B21/045 ,  G01M11/0214 ,  G01M11/0221 ,  G01M11/025

Abstract: A shape measurement apparatus includes: a holder for holding a measuring object having a spherical measurement surface; a sensor configured to emit light onto the measurement surface to perform non-contact measurement of a distance between the sensor and the measurement surface and output a measured value; a rotation mechanism for rotating the sensor around a first axis; a sensor movement mechanism for moving the sensor along a second axis orthogonal to the first axis so as to be movable across an intersection of the second axis with the first axis; a holder movement mechanism for moving the holder along a vertical direction and on a plane orthogonal to vertical direction; and a control device configured to: calculate the shape of the measurement surface based on the measured value; calculate a spherical center of the measurement surface; and cause the holder movement mechanism to match the spherical center with the intersection.