公开(公告)号：US20180364021A1

公开(公告)日：2018-12-20

申请号：US16114538

申请日：2018-08-28

Applicant: OLYMPUS CORPORATION

Inventor： Yuki TAKAHASHI

IPC: G01B5/213 ,  G01M11/02

Abstract: A shape measuring device configured to measure a shape of a surface to be measured of a target object, the device includes: a holder configured to hold the target object; a sensor configured to measure a shape of the surface to be measured and output a measurement value; a sensor rotating mechanism configured to rotate the sensor about a first axis; a sensor moving mechanism configured to move the sensor on a second axis; a holder moving mechanism configured to move the holder along a third axis; and a processor configured to: calculate a shape of the surface to be measured based on the measurement value; calculate a position of a center of sphere of the surface to be measured; and control the holder moving mechanism to match the position of the center of sphere with the intersection of the first axis and the second axis.

公开(公告)号：US20170199030A1

公开(公告)日：2017-07-13

申请号：US15469146

申请日：2017-03-24

Applicant: OLYMPUS CORPORATION

Inventor： Yuki TAKAHASHI ,  Hiroyuki SEKI ,  Masahiro UEHARA

IPC: G01B11/25

CPC classification number: G01B11/2518 ,  G01B5/0004 ,  G01B11/24 ,  G01B21/045 ,  G01M11/0214 ,  G01M11/0221 ,  G01M11/025

Abstract: A shape measurement apparatus includes: a holder for holding a measuring object having a spherical measurement surface; a sensor configured to emit light onto the measurement surface to perform non-contact measurement of a distance between the sensor and the measurement surface and output a measured value; a rotation mechanism for rotating the sensor around a first axis; a sensor movement mechanism for moving the sensor along a second axis orthogonal to the first axis so as to be movable across an intersection of the second axis with the first axis; a holder movement mechanism for moving the holder along a vertical direction and on a plane orthogonal to vertical direction; and a control device configured to: calculate the shape of the measurement surface based on the measured value; calculate a spherical center of the measurement surface; and cause the holder movement mechanism to match the spherical center with the intersection.