公开(公告)号：US11735398B2

公开(公告)日：2023-08-22

申请号：US17222431

申请日：2021-04-05

Applicant: PIE Scientific LLC

Inventor： Ximan Jiang

IPC: H01J37/32 ,  H01J37/317

CPC classification number: H01J37/32706 ,  H01J37/32357 ,  H01J37/32871 ,  H01J37/3174 ,  H01J2237/153 ,  H01J2237/184

Abstract: A method for altering surface charge on an insulating surface of a first sample includes generating first plasma inside a plasma source, causing the first plasma to diffuse into a first vacuum chamber to generate second downstream plasma, immersing the first sample in the second downstream plasma, and applying a first bias voltage to a conductive layer of the first sample, or applying a first bias voltage to a metal holder that holds the first sample.

公开(公告)号：US20220059326A1

公开(公告)日：2022-02-24

申请号：US17222431

申请日：2021-04-05

Applicant: PIE Scientific LLC

Inventor： Ximan Jiang

IPC: H01J37/32

Abstract: A method for altering surface charge on an insulating surface of a first sample includes generating first plasma inside a plasma source, causing the first plasma to diffuse into a first vacuum chamber to generate second downstream plasma, immersing the first sample in the second downstream plasma, and applying a first bias voltage to a conductive layer of the first sample, or applying a first bias voltage to a metal holder that holds the first sample.

公开(公告)号：US11830705B2

公开(公告)日：2023-11-28

申请号：US17222431

申请日：2021-04-05

Applicant: PIE Scientific LLC

Inventor： Ximan Jiang

IPC: H01J37/32 ,  H01J37/317

CPC classification number: H01J37/32706 ,  H01J37/32357 ,  H01J37/32871 ,  H01J37/3174 ,  H01J2237/153 ,  H01J2237/184

Abstract: A method for altering surface charge on an insulating surface of a first sample includes generating first plasma inside a plasma source, causing the first plasma to diffuse into a first vacuum chamber to generate second downstream plasma, immersing the first sample in the second downstream plasma, and applying a first bias voltage to a conductive layer of the first sample, or applying a first bias voltage to a metal holder that holds the first sample.