Electrostatic device for damping a mechanical vibration movement of a resonant moving object
    1.
    发明授权
    Electrostatic device for damping a mechanical vibration movement of a resonant moving object 有权
    用于阻尼共振移动物体的机械振动运动的静电装置

    公开(公告)号:US08243414B2

    公开(公告)日:2012-08-14

    申请号:US12665413

    申请日:2008-06-16

    CPC classification number: G01P15/097 G01P1/003

    Abstract: An electrostatic device for damping a mechanical vibration movement of a moving object, the moving object being made of an electrically conductive material, the movement of the moving object having at least one parasitic vibration mode of frequency fp to be damped, the device comprising an electrode ELE forming, with the moving object, a gap of capacitance C voltage-biased with a DC voltage V0 by a biasing circuit, the biasing circuit comprising, electrically connected in series with the electrode ELE: a load resistance R; possibly an inductance L; a parasitic capacitance Cp, characterized in that the biasing circuit further includes an electronic compensating device DEC having an impedance Zeq, which comprises a capacitance component Ceq, a resistance component Req, and possibly an inductance component Leq.

    Abstract translation: 一种用于阻尼运动物体的机械振动运动的静电装置,所述运动物体由导电材料制成,所述运动物体的运动具有至少一个要衰减的频率fp的寄生振动模式,所述装置包括电极 ELE与移动物体形成通过偏置电路用直流电压V0电压偏置的电容C的间隙,所述偏置电路包括与电极ELE串联电连接:负载电阻R; 可能是电感L; 寄生电容Cp,其特征在于,所述偏置电路还包括具有阻抗Zeq的电子补偿装置DEC,其包括电容分量Ceq,电阻分量Req以及可能的电感分量Leq。

    VIBRATING MICRO-SYSTEM WITH AUTOMATIC GAIN CONTROL LOOP, WITH INTEGRATED CONTROL OF THE QUALITY FACTOR
    2.
    发明申请
    VIBRATING MICRO-SYSTEM WITH AUTOMATIC GAIN CONTROL LOOP, WITH INTEGRATED CONTROL OF THE QUALITY FACTOR 有权
    具有自动增益控制环的振动微系统,具有质量因子的集成控制

    公开(公告)号:US20130008226A1

    公开(公告)日:2013-01-10

    申请号:US13540773

    申请日:2012-07-03

    CPC classification number: G01P15/097 G01C19/5776 G01L9/0008

    Abstract: A micro-system, for example a micro-sensor, comprises a resonator 10 with vibrating element(s) 11 receiving an excitation signal E of a loop 20 for automatic gain control, as a function of an amplitude setpoint (C) and providing as output a signal y(t) defined by a peak amplitude having a nominal value A0 dependent on the said setpoint and a resonant frequency. The micro-sensor integrates a circuit for measuring a quality factor of the resonator based on a measurement of an attenuation of the output signal during a momentary phase of cutoff of the excitation signal E applied to the resonator. This circuit for measuring the quality factor is configured so as to activate the excitation signal cutoff phase, for a duration of cutoff Td such that at the end of the cutoff phase, the peak amplitude of the output signal is attenuated by factor to the nominal peak amplitude A0 at the start of the cutoff phase, by a factor k with 1

    Abstract translation: 微系统例如微传感器包括具有振动元件11的谐振器10,振动元件11接收作为幅度设定点(C)的函数的用于自动增益控制的回路20的激励信号E,并且提供为 输出由具有取决于所述设定点的标称值A0和谐振频率的峰值振幅所限定的信号y(t)。 微传感器基于在施加到谐振器的激励信号E的截止的瞬时相位期间的输出信号的衰减的测量来集成用于测量谐振器的品质因数的电路。 这个用于测量质量因子的电路被配置成激活信号截止相位,在截止Td的持续时间内,使得在截止相位结束时,输出信号的峰值振幅被衰减到标称峰值 振幅A0在截止阶段的开始,乘以1

    Vibrating beam accelerometer
    3.
    发明授权
    Vibrating beam accelerometer 有权
    振动梁加速度计

    公开(公告)号:US07124633B2

    公开(公告)日:2006-10-24

    申请号:US10537297

    申请日:2003-12-01

    CPC classification number: G01P15/097

    Abstract: Accelerometer micromachined in a plane plate comprising a base, and at least one measurement cell including a moveable seismic mass connected to the base and capable of moving translationally along the sensitive y axis of the accelerometer under the effect of an acceleration γ along this y axis, a resonator cell that comprises a resonator that can vibrate and be subjected to a tensile or compressive force depending on the direction of the acceleration γ and is placed symmetrically with respect to an axis of symmetry S of the structure, this axis S being parallel to the y axis and passing through the center of gravity of the seismic mass, the measurement cell furthermore including amplification means for amplifying the acceleration force, which means comprise at least one anchoring foot for anchoring to the base, two rigid terminations of the resonator cell and two pairs of micromachined arms symmetrical with respect to the axis S, each pair comprising a first arm connecting a termination to the seismic mass, and a second arm connecting the same termination to the anchoring foot, the angle α between the Ox axis and the first arm being small enough for the tensile or compressive force exerted on the resonator to be greater than the acceleration force exerted on the seismic mass.

    Abstract translation: 加速度计微机械加工在包括基座的平板中,以及至少一个测量单元,其包括连接到基座的可移动地震块,并且能够沿着该y轴在加速度γ的作用下沿加速度计的灵敏y轴平移运动, 谐振器单元,其包括可以根据加速度γ的方向振动并受到拉伸或压缩力的谐振器,并且相对于该结构的对称轴S对称放置,该轴S平行于 y轴并且穿过地震质量的重心,测量单元还包括用于放大加速力的放大装置,该装置包括至少一个用于锚固到基座的锚定脚,谐振腔的两个刚性终端和两个 成对的微加工臂相对于轴线S对称,每对包括连接在其上的第一臂 对地震质量的萌芽,以及连接同一终端与锚定脚的第二臂,Ox轴与第一臂之间的角度α足够小以致于施加在谐振器上的拉伸或压缩力大于加速力 施加在地震块上。

    Micro-machined accelerometer
    4.
    发明授权
    Micro-machined accelerometer 有权
    微加工加速度计

    公开(公告)号:US08297121B2

    公开(公告)日:2012-10-30

    申请号:US12575837

    申请日:2009-10-08

    CPC classification number: G01P15/097 G01P1/006

    Abstract: A micromachined accelerometer in a flat plate includes a base and at least two resonator measuring cells provided with a common mobile seismic element, the two measuring cells being placed one on each side of the common mobile seismic element along the sensitive axis of the accelerometer, such that under the effect of an acceleration, the resonator of one measuring cell undergoes a traction while the resonator of the other measuring cell undergoes a compression, the measuring cells respectively configured to amplify the acceleration force generating the translation of the common mobile seismic element provided with a respective anchoring foot-piece. The common mobile seismic element includes at least two mobile seismic masses able to be displaced in translation along the sensitive axis of the accelerometer and/or in rotation with respect to a respective axis of rotation substantially orthogonal to the sensitive axis under the effect of an acceleration along the sensitive axis.

    Abstract translation: 平板中的微机械加速度计包括基座和至少两个具有公共移动地震元件的谐振器测量单元,两个测量单元沿着加速度计的敏感轴被放置在公共移动地震单元的每一侧上, 在加速度的作用下,一个测量单元的谐振器经受牵引力,而另一个测量单元的谐振器经受压缩,测量单元分别被配置成放大加速力,产生提供的公共移动地震单元的平移 相应的锚固脚部。 常用的移动地震单元包括至少两个移动地震质量块,能够沿加速度传感器的敏感轴线平移并且/或相对于基本垂直于敏感轴线的相应转动轴线在加速度的作用下移位 沿着敏感轴。

    Vibrating micro-system with automatic gain control loop, with integrated control of the quality factor
    5.
    发明授权
    Vibrating micro-system with automatic gain control loop, with integrated control of the quality factor 有权
    振动微系统具有自动增益控制回路,具有综合控制的品质因素

    公开(公告)号:US09176165B2

    公开(公告)日:2015-11-03

    申请号:US13540773

    申请日:2012-07-03

    CPC classification number: G01P15/097 G01C19/5776 G01L9/0008

    Abstract: A micro-system, for example a micro-sensor, includes a resonator 10 with vibrating element(s) 11 receiving an excitation signal E of a loop 20 for automatic gain control, as a function of an amplitude setpoint (C) and providing as output a signal y(t) defined by a peak amplitude having a nominal value A0 dependent on the said setpoint and a resonant frequency. The micro-sensor integrates a circuit for measuring a quality factor of the resonator based on a measurement of an attenuation of the output signal during a momentary phase of cutoff of the excitation signal E applied to the resonator. This circuit for measuring the quality factor is configured so as to activate the excitation signal cutoff phase, for a duration of cutoff Td such that at the end of the cutoff phase, the peak amplitude of the output signal is attenuated by factor to the nominal peak amplitude A0 at the start of the cutoff phase, by a factor k with 1

    Abstract translation: 微系统(例如微传感器)包括具有振动元件11的谐振器10,振动元件11接收作为幅度设定点(C)的函数的用于自动增益控制的环路20的激励信号E,并且提供为 输出由具有取决于所述设定点的标称值A0和谐振频率的峰值振幅所限定的信号y(t)。 微传感器基于在施加到谐振器的激励信号E的截止的瞬时相位期间的输出信号的衰减的测量来集成用于测量谐振器的品质因数的电路。 这个用于测量质量因子的电路被配置成激活信号截止相位,在截止Td的持续时间内,使得在截止相位结束时,输出信号的峰值振幅被衰减到标称峰值 振幅A0在截止阶段的开始,乘以1

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