SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

    公开(公告)号:US20200287108A1

    公开(公告)日:2020-09-10

    申请号:US16811910

    申请日:2020-03-06

    Abstract: A semiconductor device includes a substrate, an optical element, and a semiconductor element. The substrate includes a first region and a second region which are regions differing from each other. The optical element is formed in one of the first region and the second region. The electric element is formed in another of the first region and the second region. The first region includes a first insulating layer and a first semiconductor layer formed on the first insulating layer. The second region includes the first insulating layer, the first semiconductor layer, a second insulating layer formed on the first semiconductor layer, and a second semiconductor layer formed on the second insulating layer.

    SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD THEREOF
    4.
    发明申请
    SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURING METHOD THEREOF 有权
    半导体集成电路器件及其制造方法

    公开(公告)号:US20150145009A1

    公开(公告)日:2015-05-28

    申请号:US14531336

    申请日:2014-11-03

    Inventor: Seigo NAMIOKA

    Abstract: In order to achieve high-speed operation of an eDRAM, the eDRAM includes: a selection MISFET having a gate electrode that serves as a word line, a source region, and a drain region; a source plug electrode coupled to the source region; and a drain plug electrode coupled to the drain region DR1. The eDRAM further includes: a capacitive plug electrode coupled to the drain plug electrode; a bit line coupled to the source plug electrode; a stopper film covering the bit line; and a capacitive element that is formed over the stopper film and has a first electrode, a dielectric film, and a second electrode. The first electrode is coupled to the capacitive plug electrode, and the height of the capacitive plug electrode and that of the bit line are equal to each other.

    Abstract translation: 为了实现eDRAM的高速操作,eDRAM包括:具有用作字线的栅电极,源极区和漏极区的选择MISFET; 源极电极,其耦合到所述源极区域; 以及连接到漏区DR1的排水塞电极。 eDRAM还包括:电容式插头电极,其联接到排水塞电极; 耦合到源极插头电极的位线; 覆盖位线的阻挡膜; 以及形成在所述阻挡膜上并具有第一电极,电介质膜和第二电极的电容元件。 第一电极耦合到电容式插头电极,并且电容式插头电极和位线的高度彼此相等。

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