公开(公告)号：US09702826B2

公开(公告)日：2017-07-11

申请号：US14751477

申请日：2015-06-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kohei Hashimoto ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/958

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/958 ,  G01N2201/06113 ,  G01N2201/0636

Abstract: A method of inspecting a surface of an object includes providing a laser beam irradiated in a first direction substantially parallel to the surface of the object, adjusting a diameter of the annular laser beam, reflecting the annular laser beam toward the surface of the object in a second direction substantially perpendicular to the first direction, in a primary reflection, and reflecting the primarily reflected laser toward an inspection region of the object, in a secondary reflection. An incident angle of the annular laser beam with respect to the surface of the object may be determined by the diameter of the annular laser beam.

公开(公告)号：US20170097503A1

公开(公告)日：2017-04-06

申请号：US15242147

申请日：2016-08-19

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kohei Hashimoto

IPC: G02B26/12 ,  G02B21/00

CPC classification number: G02B26/123 ,  G02B13/0005 ,  G02B21/0032 ,  G02B21/0048 ,  G02B26/124 ,  G02B26/125 ,  G02B26/127

Abstract: A multi-beam scanner may include a scan lens and a reflecting mirror. The scan lens may have eccentric incidence points offset from a center point of the scan lens to which at least two light beams may be irradiated. The scan lens may be configured to concentrate the light beams. The concentrated light beams may be incidence to the reflecting mirror. Thus, an object may be scanned by the light beams using only one scan lens so that the multi-beam scanner may have a less complex structure.