公开(公告)号：US20200338890A1

公开(公告)日：2020-10-29

申请号：US16854999

申请日：2020-04-22

Applicant: SEIKO EPSON CORPORATION

Inventor： Wataru TAKAHASHI ,  Hiroaki OKUI

IPC: B41J2/14 ,  B41J2/175

Abstract: A liquid ejecting head includes a flow path substrate configuring a side face of a pressure chamber in communication with a nozzle through which a liquid is ejected, a diaphragm including a first face joined to the flow path substrate and a second face on an opposite side of the diaphragm to the first face, and a drive device provided on the second face and configured to change pressure in the pressure chamber. A corner of the side face of the pressure chamber includes a curved face having a center of curvature positioned in the pressure chamber in plan view, a recess is formed in the first face, and the pressure chamber is positioned inside the recess in plan view.

公开(公告)号：US20180178513A1

公开(公告)日：2018-06-28

申请号：US15845833

申请日：2017-12-18

Applicant: SEIKO EPSON CORPORATION

Inventor： Satoshi KIMURA ,  Hitoshi MATSUMOTO ,  Wataru TAKAHASHI ,  Satoshi SUZUKI

IPC: B41J2/14

Abstract: A liquid ejecting head (recording head) includes a structure (flow path member) having a plurality of stacked plates (a nozzle plate, a flow path plate, and a diaphragm) in which end surfaces at both sides in one direction are aligned. At least two plates of the plates (the nozzle plate, the flow path plate, and the diaphragm) have different coefficients of linear expansion in the one direction, and holding members are fixed to the end surfaces of the structure (flow path member) at both sides in the one direction, the holding members having stiffness higher than stiffness of a plate having the highest coefficient of linear expansion in the one direction among the plates (the nozzle plate, the flow path plate, and the diaphragm).

公开(公告)号：US20170113462A1

公开(公告)日：2017-04-27

申请号：US15299899

申请日：2016-10-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Wataru TAKAHASHI ,  Yasuhide MATSUO ,  Kenji OTSUKA

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14233 ,  B41J2/1433 ,  B41J2/1607 ,  B41J2/161 ,  B41J2/162 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1646 ,  B41J2202/11

Abstract: A method for manufacturing a MEMS device in which a plurality of substrates are joined in a stacked state and one face of faces defining a space formed in one substrate of the plurality of substrates is a movable region is disclosed.