公开(公告)号：US20220084814A1

公开(公告)日：2022-03-17

申请号：US17531741

申请日：2021-11-20

Applicant: SEMES CO., LTD.

Inventor： SANGMIN LEE ,  JOO JIB PARK ,  BOONG KIM ,  JONG DOO LEE

IPC: H01L21/02 ,  H01L21/687 ,  H01L21/67 ,  B08B5/02

Abstract: The apparatus includes a chamber having a first body and a second body that are combined with each other to form a processing space inside, an actuator that moves a relative position between the first body and the second body to enable a position change between a closed position in which the processing space is sealed from the outside and an open position in which the processing space is open to the outside, the actuator to sequentially perform a high-speed closing step of moving the first body or the second body at a first speed and a low-speed closing step of moving the first body or the second body at a second speed lower than the first speed, at the time of the position change from the open position to the closed position.

公开(公告)号：US20190333759A1

公开(公告)日：2019-10-31

申请号：US16396906

申请日：2019-04-29

Applicant: SEMES CO., LTD.

Inventor： SANGMIN LEE ,  JOO JIB PARK ,  BOONG KIM ,  JONG DOO LEE

IPC: H01L21/02 ,  B08B5/02 ,  H01L21/67 ,  H01L21/687

Abstract: The apparatus includes a chamber having a first body and a second body that are combined with each other to form a processing space inside, an actuator that moves a relative position between the first body and the second body to enable a position change between a closed position in which the processing space is sealed from the outside and an open position in which the processing space is open to the outside, the actuator to sequentially perform a high-speed closing step of moving the first body or the second body at a first speed and a low-speed closing step of moving the first body or the second body at a second speed lower than the first speed, at the time of the position change from the open position to the closed position.

公开(公告)号：US20190115210A1

公开(公告)日：2019-04-18

申请号：US16159839

申请日：2018-10-15

Applicant: SEMES CO., LTD.

Inventor： BOONG KIM ,  JOO JIB PARK ,  WOO YOUNG KIM

IPC: H01L21/02 ,  H01L21/67 ,  B08B3/08 ,  B08B7/00

Abstract: Disclosed are a substrate processing apparatus and a substrate processing method. The substrate processing apparatus includes a chamber having a first housing and a second housing that are combined with each other to form a processing space inside, and a housing actuator that moves the first housing to open or close the processing space. The housing actuator includes a plurality of cylinder units coupled to the first housing, a fluid supply unit that supplies a fluid for operating the plurality of cylinder units, and a deviation correction unit that corrects an operation deviation between the plurality of cylinder units. The deviation correction unit corrects the operation deviation between the plurality of cylinder units coupled to the chamber, thereby minimizing particles that are generated when the chamber is opened/closed.