公开(公告)号：US20230062770A1

公开(公告)日：2023-03-02

申请号：US17896614

申请日：2022-08-26

Applicant: SEMES CO., LTD.

Inventor： Dong Hyuk SEO ,  Myung Hwan OH ,  Bong Kuk KIM ,  Sung Yong LEE ,  Min Jun KIM

IPC: H01L21/67

Abstract: The inventive concept relates to a heating member for heating a substrate. In an embodiment, the heating member includes a heater plate having at least one heating element bonded thereto, a connecting plate having a first space formed therein in which the heating element is accommodated, and a control plate having a control element bonded thereto, the control element being electrically connected with the heating element to control the heating element.