公开(公告)号：US12061097B2

公开(公告)日：2024-08-13

申请号：US17560390

申请日：2021-12-23

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Sang Min Lee ,  Jong Hyeon Woo ,  Hwan Bin Kim

IPC: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

Abstract: A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor may include a base having a shape of the substrate, one or more sensors provided in the base and including 3 or more axis acceleration sensors or 6 or more axis measurement units (IMUs), a receiver configured to receive data collected by the one or more sensors and a power source configured to provide electric power to the one or more sensors and the receiver.