公开(公告)号：US12300517B2

公开(公告)日：2025-05-13

申请号：US17547182

申请日：2021-12-09

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Young Hun Lee ,  Myung Seok Cha

IPC: H01L21/67

Abstract: The inventive concept provides a temperature controlling method. The temperature controlling method for controlling a temperature of a tank storing a treating fluid transferred to the chamber, comprises supplying the treating fluid to the inner space of the tank, heating the treating fluid at the inner space, and transferring the heated treating fluid to the chamber, wherein the temperature of the inner space is controlled based on a measured pressure of the inner space.

公开(公告)号：US12266561B2

公开(公告)日：2025-04-01

申请号：US17529649

申请日：2021-11-18

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Do Hyeon Yoon

IPC: H01L21/687 ,  B08B3/02 ,  B08B3/08

Abstract: The present invention provides an apparatus for treating a substrate, including: a process chamber including a first body and a second body which are combined with each other to form a treatment space for treating a substrate is treated therein; a driver which moves the process chamber to an open position or a close position; a support unit which supports a substrate within the treatment space; and a fluid supply unit which supplies a fluid to the treatment space, in which the support unit includes: a support pin coupled to the first body or the second body; and a guide member which is coupled to the support pin and extends in a lateral direction of the support pin to support the substrate.

公开(公告)号：US12083551B2

公开(公告)日：2024-09-10

申请号：US17884709

申请日：2022-08-10

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Woo Jin Chung ,  Ki Bong Kim

IPC: B05C11/10 ,  B05C5/02 ,  H01L21/67

CPC classification number: B05C5/0225 ,  B05C11/1002 ,  B05C11/1031

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing a treating space; and a fluid supply unit supplying a treating fluid to the chamber, and wherein the fluid supply unit includes: a supply tank storing the treating fluid; a supply line connecting the supply tank and the chamber; and a plurality of valves installed at the supply line, and wherein any one valve among the plurality of valves is provided as a safety valve, and wherein the safety valve is opened after confirming that the chamber has been switched to a closed state when supplying the treating fluid from a tank to the chamber.

公开(公告)号：US12057335B2

公开(公告)日：2024-08-06

申请号：US17957428

申请日：2022-09-30

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Jin Se Park ,  Ki Hoon Choi

IPC: G01N1/10 ,  G01N1/20 ,  H01L21/67 ,  H01L21/66

CPC classification number: H01L21/67253 ,  G01N1/10 ,  H01L21/67034

Abstract: Provided is a concentration measuring apparatus, which measures a concentration of a fluid under a high-pressure environment, such as an environment in which a supercritical fluid is provided. The concentration measuring apparatus includes: a concentration meter for measuring a concentration of a first fluid contained in a fluid in the measurement line; a sampling line for transferring a process fluid of a processing space in which a substrate is treated in a high-pressure environment to the measurement line; a control valve for opening and closing the sampling line; a fluid pressure regulator installed downstream the control valve in the sampling line and configured to adjust the passing fluid to a set pressure; and a decompression tank installed between the sampling line and the measurement line.

公开(公告)号：US12272569B2

公开(公告)日：2025-04-08

申请号：US17547182

申请日：2021-12-09

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Young Hun Lee ,  Myung Seok Cha

IPC: H01L21/67

Abstract: The inventive concept provides a temperature controlling method. The temperature controlling method for controlling a temperature of a tank storing a treating fluid transferred to the chamber, comprises supplying the treating fluid to the inner space of the tank, heating the treating fluid at the inner space, and transferring the heated treating fluid to the chamber, wherein the temperature of the inner space is controlled based on a measured pressure of the inner space.

公开(公告)号：US12278119B2

公开(公告)日：2025-04-15

申请号：US17837135

申请日：2022-06-10

Applicant: SEMES CO., LTD.

Inventor： Myung Seok Cha ,  Sang Min Lee ,  Jin Woo Jung ,  Do Hyeon Yoon

IPC: H01L21/67 ,  C23C16/44 ,  H01L21/02

Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber providing an inner space; a fluid supply unit configured to supply a treating fluid to the inner space; and a fluid exhaust unit configured to exhaust the treating fluid from the inner space, and wherein the fluid exhaust unit includes: an exhaust line connected to the chamber; and a pressure adjusting member installed at the exhaust line and configured to maintain a pressure of the inner space to a set pressure, and wherein the fluid supply unit includes: a fluid supply source; and a supply line provided between the fluid supply source and the chamber, and wherein at the supply line or the exhaust line a flow rate measuring member configured to measure a flow rate per unit time of the treating fluid flowing at the inner space is installed.

公开(公告)号：US12131918B2

公开(公告)日：2024-10-29

申请号：US17667459

申请日：2022-02-08

Applicant: SEMES CO., LTD.

Inventor： Sang Min Lee ,  Seung Hoon Oh ,  Yong Joon Im ,  Hyo Won Yang

IPC: H01L21/67 ,  B08B3/04 ,  F26B5/00

CPC classification number: H01L21/67028 ,  H01L21/67023 ,  B08B3/04 ,  F26B5/005 ,  H01L21/6719

Abstract: A substrate processing apparatus includes a process chamber including a first body and a second body that are coupled to each other to form a processing space therein, a clamping member configured to clamp the first body and the second body, and an anti-friction member mounted in a groove formed in a contact region between the first body or the second body and the clamping member.

公开(公告)号：US11591167B2

公开(公告)日：2023-02-28

申请号：US16396120

申请日：2019-04-26

Applicant: SEMES CO., LTD.

Inventor： Seung Keun Jun ,  Jun Sang Ahn ,  Sang Min Lee ,  Eun Sang Yoon

IPC: H01L21/67 ,  B65G47/90 ,  H01L21/677 ,  B65G39/071

Abstract: A tower lift includes a main frame extending in a vertical direction, a carriage module configured to be movable in the vertical direction along the main frame, a weight module disposed behind the carriage module and configured to be movable in the vertical direction along the main frame, a driving module disposed on the main frame and configured to move the carriage module and the weight module in the vertical direction using at least one timing belt, an auto tensioner disposed on a lower portion of the main frame and connected with the carriage module and the weight module by a balance belt, and an upper alignment unit for aligning a horizontal position of the at least one timing belt.

公开(公告)号：US12061097B2

公开(公告)日：2024-08-13

申请号：US17560390

申请日：2021-12-23

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Sang Min Lee ,  Jong Hyeon Woo ,  Hwan Bin Kim

IPC: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

Abstract: A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor may include a base having a shape of the substrate, one or more sensors provided in the base and including 3 or more axis acceleration sensors or 6 or more axis measurement units (IMUs), a receiver configured to receive data collected by the one or more sensors and a power source configured to provide electric power to the one or more sensors and the receiver.

公开(公告)号：US12060942B2

公开(公告)日：2024-08-13

申请号：US17544950

申请日：2021-12-08

Applicant: SEMES CO., LTD.

Inventor： Seung Hoon Oh ,  Sang Min Lee ,  Jong Doo Lee ,  Jin Mo Jae ,  Young Hun Lee

IPC: F16J15/3204 ,  B08B7/00

CPC classification number: F16J15/3204 ,  B08B7/0021

Abstract: A sealing member for use in sealing a chamber for treating a substrate, the sealing member inserted in a groove formed in the chamber, includes a bottom part, a top part opposite the bottom part, an inner part connecting a first side of the bottom part to the top part, an outer part opposite the inner part and connecting a second side of the bottom part to the top part, and a recessed portion between the top part and the outer part.