公开(公告)号：US12061097B2

公开(公告)日：2024-08-13

申请号：US17560390

申请日：2021-12-23

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Sang Min Lee ,  Jong Hyeon Woo ,  Hwan Bin Kim

IPC: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01C9/02 ,  G01C19/00 ,  G01P15/08 ,  G01P15/18

Abstract: A substrate type sensor provided in an atmosphere accompanied by a temperature change to measure a horizontality of a support member that supports a substrate is disclosed. The substrate type sensor may include a base having a shape of the substrate, one or more sensors provided in the base and including 3 or more axis acceleration sensors or 6 or more axis measurement units (IMUs), a receiver configured to receive data collected by the one or more sensors and a power source configured to provide electric power to the one or more sensors and the receiver.

公开(公告)号：US11703520B2

公开(公告)日：2023-07-18

申请号：US17482845

申请日：2021-09-23

Applicant: SEMES CO., LTD.

Inventor： Yong-Jun Seo ,  Sang Hyun Son ,  Ji Su Hong ,  Jae Myoung Lee ,  Dong Ok Ahn

IPC: G01P5/12 ,  G01P13/04 ,  G01P13/00 ,  G01P13/02

CPC classification number: G01P5/12 ,  G01P13/006 ,  G01P13/02 ,  G01P13/045

Abstract: The inventive concept provides a wafer type sensor unit which acquires data on a wind direction and a wind velocity of an air flow during processing, the wafer type sensor unit supported by a supporting unit of a substrate processing apparatus. The unit comprising a wafer-shaped circuit board and a hot-wired wind velocity sensor placed apart from an upper surface of the circuit board.

公开(公告)号：US12224189B2

公开(公告)日：2025-02-11

申请号：US17564562

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Jun Gwon Lee ,  Hak Hyon Kim ,  Sun Yong Park

IPC: H01L21/67 ,  C23C16/02 ,  C23C16/455 ,  C23C16/52 ,  G01L5/00 ,  G01L19/08 ,  G01L19/14

Abstract: A substrate type sensor includes a substrate shape member, a pressure sensor panel provided at the substrate shape member, the pressure sensor panel including a plurality of pressure sensors, a central module including a transmission unit, the reception unit receiving data from the pressure sensor panel, and a battery proving power to the pressure sensor panel and the central module.

公开(公告)号：US11923219B2

公开(公告)日：2024-03-05

申请号：US16912762

申请日：2020-06-26

Applicant: SEMES CO., LTD.

Inventor： Youngseop Choi ,  Young Hun Lee ,  Yong-Jun Seo ,  Bok Kyu Lee ,  Miso Park

IPC: H01L21/67 ,  B08B3/08 ,  B08B7/04 ,  B08B13/00

CPC classification number: H01L21/67248 ,  B08B3/08 ,  B08B7/04 ,  B08B13/00 ,  H01L21/67051 ,  H01L21/67103 ,  H01L21/6719

Abstract: The inventive concept relates to an apparatus for treating a substrate. In an embodiment, the apparatus includes a process chamber having a process space in which the substrate is treated with a fluid in a supercritical state, a support unit that supports the substrate in the process space, a fluid supply unit that supplies the fluid into the process space, a filler member disposed to face the substrate placed on the support unit in the process space, and a measurement unit that measures a state in the process space, the measurement unit being provided in the filler member.

公开(公告)号：US12046466B2

公开(公告)日：2024-07-23

申请号：US17965911

申请日：2022-10-14

Applicant: SEMES CO., LTD.

Inventor： Yong-Jun Seo ,  Hyun Yoon ,  Jungsuk Goh ,  Byeong Geun Kim ,  Yoonki Sa ,  Doyeon Kim ,  Yerim Yeon ,  Choonghyun Lee ,  Pil Kyun Heo ,  Youngje Um ,  Jaeseong Lee ,  Dongok Ahn

IPC: H01L21/02 ,  H01L21/67

CPC classification number: H01L21/02101 ,  H01L21/6715

Abstract: The inventive concept provides a method for treating a substrate. In an embodiment, the substrate treating method includes a treatment step of treating a residue on the substrate with a first fluid in a supercritical state and a second fluid in a supercritical state in a process space of a chamber, and the first fluid in the supercritical state and the second fluid in the supercritical state have different densities.

公开(公告)号：US11933808B2

公开(公告)日：2024-03-19

申请号：US17564676

申请日：2021-12-29

Applicant: SEMES CO., LTD.

Inventor： Young Seop Choi ,  Yong-Jun Seo ,  Sang Hyun Son ,  Ji Young Lee ,  Gyeong Ryul Kim ,  Sun Yong Park

IPC: G01P1/02 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

CPC classification number: G01P1/023 ,  G01C9/00 ,  G01P15/18 ,  H02J7/02 ,  H02J50/10

Abstract: A buffer unit for temporarily storing a substrate includes a housing having a space for storing a substrate therein, one or more slots disposed within the housing for placing a substrate thereon, and a holding unit disposed at a bottom portion of the housing, having a flat and non-inclined top surface, and comprising a built-in wireless charging module. A substrate type sensor is stored at the holding unit.