APPARATUS AND METHOD FOR CHECKING POINT OF IMPACT

    公开(公告)号:US20220380132A1

    公开(公告)日:2022-12-01

    申请号:US17740354

    申请日:2022-05-10

    Abstract: Provided is an apparatus for checking a point of impact. The apparatus for checking a point of impact includes: a first supply unit configured to supply an object through rolling; a second supply unit configured to receive the object from the first supply unit through rolling and supply the object to a demand place; a variable unit configured to apply a tension force by pressurizing the object or release the tension force by releasing the pressurization based on a change in a position; a detection unit configured to detect the change in the position of the variable unit to generate position information of the object; a guide unit provided between the first supply unit and the second supply unit to guide the object; and a control unit configured to control a handling process including the supply of the object based on the position information of the detection unit.

    HEAD MAINTENANCE UNIT AND APPARATUS FOR TREATING SUBSTRATE

    公开(公告)号:US20220153030A1

    公开(公告)日:2022-05-19

    申请号:US17529323

    申请日:2021-11-18

    Abstract: The present invention provides an apparatus for treating a substrate, the apparatus including: a head unit including a head formed with one or more nozzles that discharge a treatment liquid to a substrate; and a head maintenance unit configured to perform maintenance for the head, in which the head maintenance unit may include: a liquid receiving block formed with one or more liquid receiving parts having liquid receiving spaces with open tops; a decompression line fluidly-communicating with the liquid receiving space and configured to provide reduced pressure to the liquid receiving space; and a decompression valve installed in the decompression line.

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