公开(公告)号：US20240149308A1

公开(公告)日：2024-05-09

申请号：US18487554

申请日：2023-10-16

Applicant: SEMES CO., LTD.

Inventor： Seungtae YANG ,  Sangwoo PARK ,  Youngjoon HAN ,  Seonghyeon KIM ,  Gi Hun CHOI

IPC: B08B3/02 ,  B05C5/02 ,  B05C11/10 ,  B08B3/08

CPC classification number: B08B3/022 ,  B05C5/0225 ,  B05C11/1013 ,  B08B3/08 ,  H01L21/67051

Abstract: Provided is a liquid chemical supply module and a substrate processing apparatus including the same, the liquid chemical supply module including a main supplier for supplying a liquid chemical from a liquid chemical tank to at least one substrate processing apparatus, and at least one distribution supplier for connecting between the main supplier and any one substrate processing apparatus to distribute the liquid chemical supplied through the main supplier to the any one substrate processing apparatus, wherein the distribution supplier includes a distribution line branched from a main line of the main supplier, a first circulation line branched from the distribution line and connecting between the distribution line and the main line, and a second circulation line branched from the distribution line connecting between the distribution line and the main line.