公开(公告)号：US20140079877A1

公开(公告)日：2014-03-20

申请号：US14017387

申请日：2013-09-04

Applicant: SHOWA DENKO K.K.

Inventor： Yasuyuki Tsutatani ,  Daisuke Shiomi ,  Satoru Ueno ,  Ichiro Ota ,  Takehiko Okabe

IPC: G11B5/85

CPC classification number: G11B5/85 ,  C23C14/564 ,  G11B5/8408

Abstract: A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The lubricant layer is formed by vapor-phase lubrication without exposing the stacked body to atmosphere after forming the protection layer on the stacked body. A region having a gas pressure P3 is provided in a transport path of the stacked body after the formation of the protection layer and before the formation of the lubricant layer, satisfying relationships P3>P1 and P3>P2, where P1 denotes a process gas pressure at a time of forming the protection layer, and P2 denotes a process gas pressure at a time of forming the lubricant layer.

Abstract translation: 制造磁记录介质的方法在层叠体上依次形成磁记录层，保护层和润滑层。 通过气相润滑形成润滑剂层，而不在层叠体上形成保护层后将层叠体暴露在大气中。 具有气体压力P3的区域在形成保护层之后并在形成润滑剂层之前设置在堆叠体的输送路径中，满足关系P3> P1和P3> P2，其中P1表示处理气体压力 在形成保护层时，P2表示形成润滑剂层时的工艺气体压力。

公开(公告)号：US10381034B2

公开(公告)日：2019-08-13

申请号：US14533487

申请日：2014-11-05

Applicant: SHOWA DENKO K.K.

Inventor： Seiya Nagai ,  Satoru Ueno

IPC: G11B5/85 ,  C23C14/56 ,  C23C14/58 ,  G11B5/851

Abstract: Provided is an in-line type film forming apparatus including a processing chamber which is disposed to deviate from a closed path and is connected to a corner chamber, a first loading and unloading unit which unloads a substrate from a carrier and moves the substrate to the inside of the processing chamber, a second loading and unloading unit which unloads the substrate processed in the processing chamber and loads the substrate on the carrier, and a control device which performs control of driving the first and second loading and unloading units to unload the substrate from the carrier and to move the substrate to the inside of the processing chamber, and to take out the substrate processed in the processing chamber in advance from the processing chamber and to load the substrate on the carrier.

公开(公告)号：US09196285B2

公开(公告)日：2015-11-24

申请号：US14031184

申请日：2013-09-19

Applicant: SHOWA DENKO K.K.

Inventor： Yasuyuki Tsutatani ,  Daisuke Shiomi ,  Satoru Ueno

IPC: G11B5/80 ,  G11B5/85 ,  G11B5/84

CPC classification number: G11B5/85 ,  G11B5/8408

Abstract: A method of fabricating a magnetic recording medium sequentially forms a magnetic recording layer, a protection layer, and a lubricant layer on a stacked body. The stacked body is enclosed in a transfer container unit without exposing the stacked body to atmosphere after forming the protection layer on the stacked body by a deposition apparatus, and the transfer container unit is transported to a vapor-phase lubrication deposition apparatus. The stacked body is removed from the transfer container unit without exposing the stacked body to the atmosphere, in order to form the lubricant layer on the stacked body within the vapor-phase lubrication deposition apparatus.

Abstract translation: 制造磁记录介质的方法在层叠体上依次形成磁记录层，保护层和润滑层。 在通过沉积设备在堆叠体上形成保护层之后，将堆叠体封闭在转移容器单元中，而不将堆叠体暴露在大气中，并且转移容器单元被输送到气相润滑沉积设备。 为了在气相润滑成膜装置内的层叠体上形成润滑剂层，将层叠体从转印容器单元取出，不会使层叠体暴露在大气中。