公开(公告)号：US20230082421A1

公开(公告)日：2023-03-16

申请号：US17930689

申请日：2022-09-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Valentina ZEGA ,  Gabriele GATTERE ,  Attilio Alberto FRANGI ,  Andrea OPRENI ,  Manuel RIANI

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

Abstract: The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.