公开(公告)号：US20230253895A1

公开(公告)日：2023-08-10

申请号：US18161740

申请日：2023-01-30

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Andrea OPRENI ,  Valentina ZEGA ,  Attilio FRANGI ,  Gabriele GATTERE ,  Manuel RIANI

IPC: H02N1/00 ,  B81B3/00

CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2203/053 ,  B81B2203/0136

Abstract: MEMS actuator including: a substrate; a first and a second semiconductive layer; a frame including transverse regions formed by the second semiconductive layer, elongated parallel to a first direction and offset along a second direction, the frame being movable parallel to the second direction. The MEMS actuator includes, for each transverse region: corresponding front rotor regions, which are fixed to the transverse region and are suspended above the substrate; a first and a second stator region, which are formed by the first semiconductive layer in such a way that, when the frame is in rest position, the transverse region is laterally offset with respect to the first and the second stator regions and a first front rotor region partially faces the first stator region, and in such a way that, during a translation of the frame along the second direction, the first and/or a second front rotor region at least partially face the second stator region, when the transverse region begins to superimpose on the first stator region.

公开(公告)号：US20230082421A1

公开(公告)日：2023-03-16

申请号：US17930689

申请日：2022-09-08

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Valentina ZEGA ,  Gabriele GATTERE ,  Attilio Alberto FRANGI ,  Andrea OPRENI ,  Manuel RIANI

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

Abstract: The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.