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公开(公告)号：US20230135941A1
公开(公告)日：2023-05-04
申请号：US18048370
申请日：2022-10-20
发明人： Gabriele GATTERE , Manuel RIANI , Carlo VALZASINA
IPC分类号： G01C19/5712 , B81B3/00
摘要： The present disclosure is directed to a MEMS gyroscope formed by a substrate and a movable mass suspended on the substrate and configured to carry out a movement in a driving direction and in a detection direction perpendicular to each other. The movable mass has a first face and a second face opposite to the first face. The gyroscope also has a first and a second quadrature compensation electrode group, fixed to the substrate and capacitively coupled to the movable mass. The first quadrature compensation electrode group faces the first face of the movable mass, and the second quadrature compensation electrode group faces the second face of the movable mass. The first and the second quadrature compensation electrode groups each have a respective variable facing area on the movable mass as a result of the movement of the movable mass in the driving direction and are configured to exert an electrostatic force on the movable mass during the movement of the movable mass in the driving direction.
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2.发明公开公开(公告)号：US20240010489A1
公开(公告)日：2024-01-11
申请号：US18341565
申请日：2023-06-26
发明人： Manuel RIANI , Gabriele GATTERE , Federico VERCESI
CPC分类号： B81B3/0021 , B81C1/0015 , B81B2203/0118 , B81B2203/0307 , B81B2203/0315 , B81C2201/0109 , B81C2201/0133
摘要： A MEMS device comprising: a semiconductor body defining a main cavity and forming an anchorage structure; and a first deformable structure having a first end and a second end that are opposite to one another along a first axis, the first deformable structure being fixed to the anchorage structure via the first end so as to be suspended over the main cavity. The second end is configured to oscillate, with respect to the anchorage structure, along a second axis. The first deformable structure comprises a main body having a first outer surface and a second outer surface, and a piezoelectric structure, which extends over the first outer surface. The main body comprises a bottom portion and a top portion that delimit along the second axis a first buried cavity aligned with the piezoelectric structure along the second axis, wherein a maximum thickness of the top portion of the main body along the second axis is smaller than a minimum thickness of the bottom portion of the main body along the second axis.
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3.发明公开公开(公告)号：US20230253895A1
公开(公告)日：2023-08-10
申请号：US18161740
申请日：2023-01-30
CPC分类号： H02N1/008 , B81B3/0021 , B81B2201/033 , B81B2203/053 , B81B2203/0136
摘要： MEMS actuator including: a substrate; a first and a second semiconductive layer; a frame including transverse regions formed by the second semiconductive layer, elongated parallel to a first direction and offset along a second direction, the frame being movable parallel to the second direction. The MEMS actuator includes, for each transverse region: corresponding front rotor regions, which are fixed to the transverse region and are suspended above the substrate; a first and a second stator region, which are formed by the first semiconductive layer in such a way that, when the frame is in rest position, the transverse region is laterally offset with respect to the first and the second stator regions and a first front rotor region partially faces the first stator region, and in such a way that, during a translation of the frame along the second direction, the first and/or a second front rotor region at least partially face the second stator region, when the transverse region begins to superimpose on the first stator region.
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公开(公告)号：US20230082421A1
公开(公告)日：2023-03-16
申请号：US17930689
申请日：2022-09-08
IPC分类号： G01P15/097 , G01P15/08 , G01P15/125 , G01P15/18
摘要： The present disclosure is directed to a detection structure for a vertical-axis resonant accelerometer. The detection structure includes an inertial mass suspended above a substrate and having a window provided therewithin and traversing it throughout a thickness thereof. The inertial mass is coupled to a main anchorage, arranged in the window and integral with the substrate, through a first and a second anchoring elastic element of a torsional type. The detection structure also includes at least a first resonant element having longitudinal extension, coupled between the first elastic element and a first constraint element arranged in the window. The first constraint element is suspended above the substrate, to which it is fixedly coupled through a first auxiliary anchoring element which extends below the first resonant element with longitudinal extension and is integrally coupled between the first constraint element and the main anchorage.
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公开(公告)号：US20240151741A1
公开(公告)日：2024-05-09
申请号：US18496653
申请日：2023-10-27
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0882
摘要： The MEMS device is formed by a substrate and a movable structure suspended on the substrate. The movable structure has a first mass, a second mass and a first elastic group mechanically coupled between the first and the second masses. The first elastic group is compliant along a first direction. The first mass is configured to move with respect to the substrate along the first direction. The MEMS device also has a second elastic group mechanically coupled between the substrate and the movable structure and compliant along the first direction; and an anchoring control structure fixed to the substrate, capacitively coupled to the second mass and configured to exert an electrostatic force on the second mass along the first direction. The anchoring control structure controls the MEMS device in a first operating state, wherein the second mass is free to move with respect to the substrate along the first direction, and in a second operating state, wherein the anchoring control structure applies a pull-in force on the second mass which anchors the second mass to the anchoring structure.
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6.发明申请公开(公告)号：US20220380199A1
公开(公告)日：2022-12-01
申请号：US17752016
申请日：2022-05-24
IPC分类号： B81B3/00
摘要： A MEMS actuator includes a mobile mass suspended over a substrate in a first direction and extending in a plane that defines a second direction and a third direction perpendicular thereto. Elastic elements arranged between the substrate and the mobile mass have a first compliance in a direction parallel to the first direction that is lower than a second compliance in a direction parallel to the second direction. Piezoelectric actuation structures have a portion fixed with respect to the substrate and a portion that deforms in the first direction in response to an actuation voltage. Movement-transformation structures coupled to the piezoelectric actuation structures include an elastic movement-conversion structure arranged between the piezoelectric actuation structures and the mobile mass. The elastic movement-conversion structure is compliant in a plane formed by the first and second directions and has first and second principal axes of inertia transverse to the first and second directions.
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