公开(公告)号：US20230112999A1

公开(公告)日：2023-04-13

申请号：US18064829

申请日：2022-12-12

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Domenico GIUSTI ,  Andrea Nicola COLECCHIA ,  Gaetano SANTORUVO

IPC: B41J2/03

Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.

公开(公告)号：US20200369023A1

公开(公告)日：2020-11-26

申请号：US16882215

申请日：2020-05-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Andrea Nicola COLECCHIA ,  Gaetano SANTORUVO

IPC: B41J2/03 ,  H01L41/09 ,  H01L41/314 ,  H01L27/20

Abstract: A microfluidic device for continuous ejection of fluids includes: a semiconductor body that laterally delimits chambers; an intermediate structure which forms membranes each delimiting a top of a corresponding chamber; and a nozzle body which overlies the intermediate structure. The device includes, for each chamber: a corresponding piezoelectric actuator; a supply channel which traverses the intermediate structure and communicates with the chamber; and a nozzle which traverses the nozzle body and communicates with the supply channel. Each actuator is configured to operate i) in a resting condition such that the pressure of a fluid within the corresponding chamber causes the fluid to pass through the supply channel and become ejected from the nozzle as a continuous stream, and ii) in an active condition, where it causes a deformation of the corresponding membrane and a consequent variation of the pressure of the fluid, causing a temporary interruption of the continuous stream.