公开(公告)号：US20220123105A1

公开(公告)日：2022-04-21

申请号：US17494475

申请日：2021-10-05

Applicant: STMicroelectronics S.r.l.

Inventor： Fabrizio CERINI ,  Silvia ADORNO ,  Dario PACI ,  Marco SALINA

IPC: H01L49/02 ,  H01L23/522

Abstract: An electrode structure includes a pad of conductive material, and a conductive strip having a first end physically and electrically coupled to the pad. The pad includes an annular element internally defining a through opening. The first end of the conductive strip is physically and electrically coupled to the annular element by a transition region so that, when the conductive strip undergoes expansion by the thermal effect, a stress spreads from the conductive strip to the annular element by the transition region.

公开(公告)号：US20230328456A1

公开(公告)日：2023-10-12

申请号：US18295673

申请日：2023-04-04

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Fabrizio CERINI ,  Silvia ADORNO ,  Marco SALINA

IPC: H04R17/00 ,  H10N30/20 ,  H04R7/06 ,  H04R7/18

CPC classification number: H04R17/005 ,  H10N30/20 ,  H04R2400/11 ,  H04R7/18 ,  H04R2201/003 ,  H04R7/06

Abstract: A microelectromechanical electroacoustic transducer includes a supporting frame of semiconductor material, a membrane of semiconductor material, connected to the supporting frame along a perimeter and having central symmetry, and a piezoelectric actuator on a peripheral portion of the membrane. The membrane has through slits of elongated shape arranged around a center of the membrane.