公开(公告)号：US20230314138A1

公开(公告)日：2023-10-05

申请号：US17712718

申请日：2022-04-04

Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

Inventor： Yamu HU ,  Naren K. SAHOO ,  Pavan NALLAMOTHU ,  Deyou FANG ,  David MCCLURE ,  Marco GARBARINO

IPC: G01C19/5726 ,  G01C19/5762

CPC classification number: G01C19/5726 ,  G01C19/5762

Abstract: At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.