公开(公告)号：US20230314138A1

公开(公告)日：2023-10-05

申请号：US17712718

申请日：2022-04-04

申请人： STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

发明人： Yamu HU ,  Naren K. SAHOO ,  Pavan NALLAMOTHU ,  Deyou FANG ,  David MCCLURE ,  Marco GARBARINO

IPC分类号： G01C19/5726 ,  G01C19/5762

CPC分类号： G01C19/5726 ,  G01C19/5762

摘要： At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.

公开(公告)号：US20230273024A1

公开(公告)日：2023-08-31

申请号：US18136088

申请日：2023-04-18

申请人： STMicroelectronics, Inc.

发明人： Deyou FANG ,  Chao-Ming TSAI ,  Milad ALWARDI ,  Yamu HU ,  David MCCLURE

IPC分类号： G01C19/5726 ,  G01C25/00 ,  G01C19/5733

CPC分类号： G01C19/5726 ,  G01C19/5733 ,  G01C25/005

摘要： A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

公开(公告)号：US20220034659A1

公开(公告)日：2022-02-03

申请号：US17504994

申请日：2021-10-19

申请人： STMicroelectronics, Inc.

发明人： Deyou FANG ,  Chao-Ming TSAI ,  Milad ALWARDI ,  Yamu HU ,  David MCCLURE

IPC分类号： G01C19/5726 ,  G01C25/00 ,  G01C19/5733

摘要： A microelectromechanical system (MEMS) gyroscope includes a driving mass and a driving circuit that operates to drive the driving mass in a mechanical oscillation at a resonant drive frequency. An oscillator generates a system clock that is independent of and asynchronous to the resonant drive frequency. A clock generator circuit outputs a first clock and a second clock that are derived from the system clock. The drive loop of the driving circuit including an analog-to-digital converter (ADC) circuit that is clocked by the first clock and a digital signal processing (DSP) circuit that is clocked by the second clock.

公开(公告)号：US20220128360A1

公开(公告)日：2022-04-28

申请号：US17571973

申请日：2022-01-10

申请人： STMicroelectronics, Inc.

发明人： Yamu HU ,  Deyou FANG ,  David MCCLURE ,  Huantong ZHANG ,  Naren K. SAHOO

IPC分类号： G01C19/5719 ,  H04L27/38

摘要： A microelectromechanical system (MEMS) gyroscope sensor has a sensing mass and a quadrature error compensation control loop for applying a force to the sensing mass to cancel quadrature error. To detect fault, the quadrature error compensation control loop is opened and an additional force is applied to produce a physical displacement of the sensing mass. A quadrature error resulting from the physical displacement of the sensing mass in response to the applied additional force is sensed. The sensed quadrature error is compared to an expected value corresponding to the applied additional force and a fault alert is generated if the comparison is not satisfied.