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    MEMS GYROSCOPE START-UP PROCESS AND CIRCUIT
    1.
    发明公开
    MEMS GYROSCOPE START-UP PROCESS AND CIRCUIT 审中-公开

    公开(公告)号：US20230314138A1

    公开(公告)日：2023-10-05

    申请号：US17712718

    申请日：2022-04-04

    Applicant: STMicroelectronics, Inc. ,  STMicroelectronics S.r.l.

    Inventor： Yamu HU ,  Naren K. SAHOO ,  Pavan NALLAMOTHU ,  Deyou FANG ,  David MCCLURE ,  Marco GARBARINO

    IPC: G01C19/5726 ,  G01C19/5762

    CPC classification number: G01C19/5726 ,  G01C19/5762

    Abstract: At start-up of a microelectromechanical system (MEMS) gyroscope, the drive signal is inhibited, and the phase, frequency and amplitude of any residual mechanical oscillation is sensed and processed to determine a process path for start-up. In the event that the sensed frequency of the residual mechanical oscillation is a spurious mode frequency and a quality factor of the residual mechanical oscillation is sufficient, an anti-phase signal is applied as the MEMS gyroscope drive signal in order to implement an active dampening of the residual mechanical oscillation. A kicking phase can then be performed to initiate oscillation. Also, in the event that the sensed frequency of the residual mechanical oscillation is a resonant mode frequency with sufficient drive energy, a quadrature phase signal with phase lock loop frequency control and amplitude controlled by the drive energy is applied as the MEMS gyroscope drive signal in order to induce controlled oscillation.

    MEMS ACCELEROMETER SELF-TEST USING A VARIABLE EXCITATION VOLTAGE AND FIXED TIMING
    2.
    发明申请
    MEMS ACCELEROMETER SELF-TEST USING A VARIABLE EXCITATION VOLTAGE AND FIXED TIMING 有权

    公开(公告)号：US20230128205A1

    公开(公告)日：2023-04-27

    申请号：US17509247

    申请日：2021-10-25

    Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc.

    Inventor： Marco GARBARINO ,  Davy CHOI ,  Francesco RIZZINI ,  Yamu HU

    IPC: G01P21/00 ,  G01P1/00 ,  G01P15/125

    Abstract: A microelectromechanical system (MEMS) accelerometer sensor has a mobile mass and a sensing capacitor. To self-test the sensor, a test signal having a variably controlled excitation voltage and a fixed pulse width is applied to the sensing capacitor. The leading and trailing edges of the test signal are aligned to coincide with reset phases of a sensing circuit coupled to the sensing capacitor. The variably controlled excitation voltage of the test signal is configured to cause an electrostatic force which produces a desired physical displacement of the mobile mass. During a read phase of the sensing circuit, a variation in capacitance of sensing capacitor due to the actual physical displacement of the mobile mass is sensed for comparison to the desired physical displacement.

    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS
    3.
    发明申请
    MICROELECTROMECHANICAL GYROSCOPE WITH COMPENSATION OF QUADRATURE SIGNAL COMPONENTS 审中-公开

    公开(公告)号：US20180003504A1

    公开(公告)日：2018-01-04

    申请号：US15707707

    申请日：2017-09-18

    Applicant: STMICROELECTRONICS S.R.L.

    Inventor： Andrea DONADEL ,  Davide MAGNONI ,  Marco GARBARINO

    IPC: G01C19/5776 ,  G01C19/5726

    CPC classification number: G01C19/5776 ,  G01C19/5726

    Abstract: A gyroscope includes: a mass, which is movable with respect to a supporting body; a driving loop for keeping the mass in oscillation according to a driving axis; a reading device, which supplying an output signal indicating an angular speed of the body; and a compensation device, for attenuating spurious signal components in quadrature with respect to a velocity of oscillation of the mass. The reading device includes an amplifier, which supplies a transduction signal indicating a position of the mass according to a sensing axis. The compensation device forms a control loop with the amplifier, extracts from the transduction signal an error signal representing quadrature components in the transduction signal, and supplies to the amplifier a compensation signal such as to attenuate the error signal.

    CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS
    6.
    发明公开
    CIRCUIT AND METHOD FOR DRIVING A MICRO-ELECTRO-MECHANICAL RESONATOR OF A GYROSCOPE WITH A REDUCED EXCITATION OF SPURIOUS HARMONICS 审中-公开

    公开(公告)号：US20240240945A1

    公开(公告)日：2024-07-18

    申请号：US18403324

    申请日：2024-01-03

    Applicant: STMICROELECTRONICS S.r.l.

    Inventor： Gabriele GATTERE ,  Marco GARBARINO

    IPC: G01C19/5755

    CPC classification number: G01C19/5755

    Abstract: A driving circuit is implemented for a driving resonator stage of a MEMS gyroscope including at least a first and a second electrode and a movable mass The driving circuit includes a synchronization stage which receives an electrical position signal indicative of the position of the movable mass and generates a reference signal phase- and frequency-locked with the electrical position signal; a driving stage which generates, on the basis of the reference signal, a first and a second driving signal, which are applied to the first and, respectively, the second electrodes, so that the movable mass is subject to a first and a second electrostatic force which cause the movable mass to oscillate.

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