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公开(公告)号:US20240204029A1
公开(公告)日:2024-06-20
申请号:US18536511
申请日:2023-12-12
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Laurent GAY , Magali GREGOIRE , Bilel SAIDI , Sylvain JOBLOT , Benjamin VIANNE
IPC: H01L27/146
CPC classification number: H01L27/14636 , H01L27/14634 , H01L27/14683
Abstract: An image sensor includes photodetection pixels formed inside and on top of a semiconductor substrate. An interconnection network coats a surface of the semiconductor substrate. The interconnection network includes a level of conductive vias in contact, by their lower surface, with the photodetection pixels. The conductive vias are made of doped polysilicon and have a heavier doping on their lower surface side than on their upper surface side.