公开(公告)号：US20250102371A1

公开(公告)日：2025-03-27

申请号：US18895219

申请日：2024-09-24

Applicant: STMicroelectronics International N.V.

Inventor： Luca GUERINONI ,  Gianfranco Javier YALLICO SANCHEZ ,  Davide BERNABUCCI ,  Carlo VALZASINA ,  Claudia COMI ,  David FARACI

IPC: G01K7/34

Abstract: A MEMS metamaterial has a substrate and a suspended structure having an elementary cell which extends at a distance from the substrate along a first direction. The elementary cell has a first structural region having a first material with a first coefficient of thermal expansion. The first structural region has a first side facing the substrate and a second side opposite to the first side. The elementary cell also has a second structural region having a second material different from the first material and with a second coefficient of thermal expansion different from the first coefficient of thermal expansion. The second structural region extends on at least part of the first structural region, on the first side, the second side, or both the first and second side of the first structural region.

公开(公告)号：US20250042718A1

公开(公告)日：2025-02-06

申请号：US18784719

申请日：2024-07-25

Applicant: STMicroelectronics International N.V.

Inventor： Manuel RIANI ,  Carlo VALZASINA ,  Gianfranco Javier YALLICO SANCHEZ ,  Luca GUERINONI

IPC: B81B3/00 ,  G01P15/125

Abstract: A MEMS (MicroElectroMechanical System) device includes: a supporting body; a movable mass, constrained to the supporting body by flexures so as to be able to oscillate in a main direction; an actuator device, configured to apply to the movable mass an electrostatic actuation force, transverse to the main direction; and a control circuit configured to detect stiction conditions, in which the movable mass is stuck to the supporting body by a stiction force, and for driving the actuator device in response to recognition of the stiction conditions. The actuation force is a variable force with an actuation frequency band containing at least one resonance frequency in a direction transverse to the main direction of a mechanical system comprising the movable mass stuck to the supporting body.