公开(公告)号：US20240400380A1

公开(公告)日：2024-12-05

申请号：US18678526

申请日：2024-05-30

Applicant: STMicroelectronics International N.V.

Inventor： Patrick FEDELI ,  Luca Giuseppe FALORNI ,  Federico MORELLI ,  Paola CARULLI

IPC: B81B7/00 ,  G01C19/5684

Abstract: A microelectromechanical gyroscope includes a die of semiconductor material forming a substrate and a detection structure suspended over the substrate. The detection structure has a main extension in a horizontal plane, is symmetrical with respect to a central axis of symmetry, and is provided, for each gyroscope detection axis, with: a first pair of detection masses arranged on a first side of the central axis of symmetry; and a second pair of detection masses arranged on a second side of the central axis of symmetry, opposite to the first side in the horizontal plane. The detection masses of each pair are capacitively coupled to respective stator electrodes according to a differential detection scheme. The stator electrodes are arranged symmetrically with respect to one another on opposite sides of the central axis of symmetry.

公开(公告)号：US20240327199A1

公开(公告)日：2024-10-03

申请号：US18614435

申请日：2024-03-22

Applicant: STMicroelectronics International N.V.

Inventor： Paola CARULLI ,  Patrick FEDELI ,  Luca Giuseppe FALORNI ,  Federico MORELLI

IPC: H02K33/00 ,  B81B3/00

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242

Abstract: Microelectromechanical device comprising a supporting body, containing semiconductor material and a movable mass, constrained to the supporting body with a relative degree of freedom with respect to at least one motion direction, within a range of admissible positions. The device also comprises stopper elements, operable by the movable mass due to movements along the at least one motion direction and configured to apply stop forces to opposite sides of the movable mass, transversely to the at least one motion direction, when the movable mass reaches a respective endpoint of the range of admissible positions, so as to prevent the movable mass from exceeding the respective endpoint.