公开(公告)号：US20240288680A1

公开(公告)日：2024-08-29

申请号：US18584533

申请日：2024-02-22

Applicant: STMicroelectronics International N.V.

Inventor： Roberto CARMINATI ,  Tarek AFIFI AFIFI ,  Carlo Luigi PRELINI ,  Sonia COSTANTINI

IPC: G02B26/08 ,  G01B7/16 ,  G02B26/10

CPC classification number: G02B26/0833 ,  G01B7/22 ,  G02B26/101

Abstract: A MEMS device includes a semiconductor body with a fixed structure defining a cavity, and a deformable main body suspended on the cavity. A piezoelectric actuator is on the deformable main body, and a piezoelectric sensor element is on the deformable main body, which forms with the deformable main body a strain sensor. The piezoelectric sensor element includes a detection piezoelectric region of aluminum nitride on the deformable main body, and an intermediate detection electrode on the detection piezoelectric region. The deformable main body, the detection piezoelectric region, and the intermediate detection electrode form a first detection capacitor of the strain sensor. The deformable main body, the piezoelectric actuator, and the piezoelectric sensor element form a deformable structure suspended on the cavity and deformable by the piezoelectric actuator, with the strain sensor allowing the deformation of the deformable structure to be detected.