公开(公告)号：US20240061235A1

公开(公告)日：2024-02-22

申请号：US18500674

申请日：2023-11-02

Applicant: Samsung Display Co., LTD.

Inventor： Dong Eon LIM ,  Jeong Un GO ,  Hyun Jin KIM ,  Hoon Chul RYOO ,  Yeong Jin SEOL ,  Gil Yong ON ,  Yeon Hak LEE ,  Hye Ji CHO

IPC: G02B26/02 ,  H01L27/12 ,  G02B27/14 ,  G02B19/00

CPC classification number: G02B26/023 ,  H01L27/1285 ,  G02B27/144 ,  G02B19/0014

Abstract: A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.

公开(公告)号：US20210341727A1

公开(公告)日：2021-11-04

申请号：US17242405

申请日：2021-04-28

Applicant: Samsung Display Co., LTD.

Inventor： Dong Eon LIM ,  Jeong Un GO ,  Hyun Jin KIM ,  Hoon Chul RYOO ,  Yeong Jin SEOL ,  Gil Yong ON ,  Yeon Hak LEE ,  Hye Ji CHO

IPC: G02B26/02 ,  G02B19/00 ,  G02B27/14 ,  H01L27/12

Abstract: A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.